Abstract: A method of manufacturing a semiconductor device having a first wiring layer, a first interlayer insulating film, a second interlayer insulating film, a third interlayer insulating film, and a second wiring layer, in which the method includes depositing the second wiring layer on the third interlayer insulating film and, where the widths of first wiring layer and the second wiring layer are 10.0 ?m or greater, executing one of etching the second wiring layer to set a width of 1.0 ?m or greater in a portion where the first wiring layer and the second wiring layer overlap and etching the second wiring layer to seta horizontal distance of 2.0 ?m or greater between adjacent portions of the first wiring layer and the second wiring layer.

Abstract: A method of manufacturing a semiconductor device having a first wiring layer, a first interlayer insulating film, a second interlayer insulating film, a third interlayer insulating film, and a second wiring layer, in which the method includes depositing the second wiring layer on the third interlayer insulating film and, where the widths of first wiring layer and the second wiring layer are 10.0 ?m or greater, executing one of etching the second wiring layer to set a width of 1.0 ?m or greater in a portion where the first wiring layer and the second wiring layer overlap and etching the second wiring layer to seta horizontal distance of 2.0 ?m or greater between adjacent portions of the first wiring layer and the second wiring layer.

Abstract: A disclosed semiconductor wafer includes plural semiconductor chip areas each having a color pattern capable of tracing the positional information of the semiconductor chip with respect to the semiconductor wafer. Each of the plural semiconductor chip areas arranged in a matrix manner on the semiconductor wafer includes an underlying insulation film; a wiring pattern and a frame-shaped wiring dummy pattern formed on the underlying insulation film; and plural insulation films formed on the upper side of the underlying insulation film, the wiring pattern, and the wiring dummy pattern. At least one SOG film is included in the plural insulation films, in which a color pattern in accordance with a distance from the center of the semiconductor wafer based on the SOG film is formed on a surface of the insulator film within the wiring dummy pattern in top view.

Abstract: A disclosed semiconductor wafer includes plural semiconductor chip areas each having a color pattern capable of tracing the positional information of the semiconductor chip with respect to the semiconductor wafer. Each of the plural semiconductor chip areas arranged in a matrix manner on the semiconductor wafer includes an underlying insulation film; a wiring pattern and a frame-shaped wiring dummy pattern formed on the underlying insulation film; and plural insulation films formed on the upper side of the underlying insulation film, the wiring pattern, and the wiring dummy pattern. At least one SOG film is included in the plural insulation films, in which a color pattern in accordance with a distance from the center of the semiconductor wafer based on the SOG film is formed on a surface of the insulator film within the wiring dummy pattern in top view.