Patents by Inventor Fumin He
Fumin He has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9605759Abstract: A metal gasket has a cross-sectional shape that is a six sided shape that resembles an irregular quadrangle that is substantially isosceles trapezoidal in shape with two sharp angles between the longest side and the second- and third-longest sides, respectively. The longest side of the cross section is the inner wall of the metal gasket.Type: GrantFiled: December 11, 2014Date of Patent: March 28, 2017Assignee: HERMES MICROVISION INC.Inventors: Qingpo Xi, Tao Li, Feng Cao, Fumin He, Zhongwei Chen
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Patent number: 9581245Abstract: A metal seal flange assembly for a vacuum system is presented. Its metal gasket has a crossectional shape that is an irregular hexagon with two acute angles between the longest side and the second- and third-longest sides, respectively. The longest side of the irregular hexagon is the vertical inner wall of the metal gasket. This design can reduce the normal force required to seal the metal seal flange assembly and reduce the number of bolts needed, enabling use in a limited working space.Type: GrantFiled: April 2, 2012Date of Patent: February 28, 2017Assignee: HERMES MICROVISION, INC.Inventors: Qingpo Xi, Tao Li, Feng Cao, Fumin He, Zhongwei Chen
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Publication number: 20150091258Abstract: The present invention introduces a metal seal flange assembly for a vacuum system. A new designed metal gasket has a crosses-section shape of irregular quadrangle with two sharp angle forms by the longer base and legs. The long base of the irregular quadrangle is the vertical inner wall of the metal gasket. A preferred cross section shape of the metal gasket is trapezoid or isosceles trapezoid. This design can reduce the normal force applied to the metal seal flange assembly and reduce the number of bolts used in a limit working space.Type: ApplicationFiled: December 11, 2014Publication date: April 2, 2015Inventors: Qingpo Xi, Tao Li, Feng Cao, Fumin He, Zhongwei Chen
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Patent number: 8895935Abstract: An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.Type: GrantFiled: March 12, 2012Date of Patent: November 25, 2014Assignee: Hermes Microvision, Inc.Inventors: Zhibin Wang, Wei He, Qingpo Xi, Shuai Li, Fumin He
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Patent number: 8829451Abstract: An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.Type: GrantFiled: June 13, 2012Date of Patent: September 9, 2014Assignee: Hermes Microvision, Inc.Inventors: Zhibin Wang, Wei He, Fumin He
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Publication number: 20130334430Abstract: An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.Type: ApplicationFiled: June 13, 2012Publication date: December 19, 2013Applicant: Hermes Microvision, Inc.Inventors: Zhibin Wang, Wei He, Fumin He
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Publication number: 20130257044Abstract: The present invention introduces a metal seal flange assembly for a vacuum system. A new designed metal gasket has a crosses-section shape of irregular quadrangle with two sharp angle forms by the longer base and legs. The long base of the irregular quadrangle is the vertical inner wall of the metal gasket. A preferred cross section shape of the metal gasket is trapezoid or isosceles trapezoid. this design can reduce the normal force applied to the metal seal flange assembly and reduce the number of bolts used in a limit working space.Type: ApplicationFiled: April 2, 2012Publication date: October 3, 2013Applicant: Hermes Microvision, Inc.Inventors: Qingpo XI, Tao LI, Feng CAO, Fumin HE, Zhongwei CHEN
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Publication number: 20130234032Abstract: An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.Type: ApplicationFiled: March 12, 2012Publication date: September 12, 2013Applicant: Hermes-Microvision, Inc.Inventors: Zhibin Wang, Wei He, Qingpo Xi, Shuai Li, Fumin He
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Patent number: 7960697Abstract: The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review. The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis. The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.Type: GrantFiled: October 23, 2008Date of Patent: June 14, 2011Assignee: Hermes-Microvision, Inc.Inventors: Zhongwei Chen, Weiming Ren, Joe Wang, Xuedong Liu, Juying Dou, Fumin He, Feng Cao, Yan Ren, Xiaoli Guo, Wei He, Qingpo Xi
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Publication number: 20100102227Abstract: The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review. The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis. The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.Type: ApplicationFiled: October 23, 2008Publication date: April 29, 2010Applicant: HERMES-MICROVISION, INCInventors: ZHONGWEI CHEN, WEIMING REN, JOE WANG, XUEDONG LIU, JUYING DOU, FUMIN HE, FENG CAO, YAN REN, XIAOLI GUO, WEI HE, QINGPO XI