Abstract: An XY stage for controlling a position of a slider part on a lattice platen in two-dimensional directions has a plurality of the slider parts whose positions are controlled independently. The plurality of the slider parts each has: a position controlling part for controlling a position of the slider part in an X axis direction and a Y axis direction; and a yawing correcting part for correcting a yawing of the slider part around a Z axis.

Abstract: A two-dimensional positioning apparatus for positioning an object in a two dimensional direction, wherein are provided a platen, a slider having two X-axis motors and sensors and a Y-axis motor and sensor disposed above the platen, a converter for providing signals to detect the X-axis position of the center point of the slider, a controller for feedback control of the slider in a X-axis direction and a yaw direction, and for feedback control in the Y-direction, and a converter circuit for converting output of the controller to propulsion commands to be supplied to the motors, wherein a limiter is provided to restrict one axis limits of the propulsion commands. In this manner, accuracy is improved and flexibility is increased.