Patents by Inventor Fusami Soeda

Fusami Soeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these
    Patent number: 5517027
    Abstract: Method for detecting and examining a slightly irregular surface state is provided which includes the steps of: illuminating a surface of a sample with light beam for detecting the slightly irregular surface state; observing a variation of the light beam occurring due to the slightly irregular surface state to specify the location of the slightly irregular surface state in an x-y plane of the sample; making the location of a probe needle of a scanning probe microscope and the location of the slightly irregular surface state on the sample coincide with each other; and measuring a three-dimensional image of the slightly irregular surface state by means of the scanning probe microscope. The scanning probe microscope for use in the aforementioned method and a method for fabricating a semiconductor device or a liquid crystal display device which utilizes the aforementioned method are also provided.
    Type: Grant
    Filed: June 6, 1994
    Date of Patent: May 14, 1996
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yoshitsugu Nakagawa, Fusami Soeda, Naohiko Fujino, Isamu Karino, Osamu Wada, Hiroshi Kurokawa, Koichiro Hori, Nobuyoshi Hattori, Masahiro Sekine, Masashi Ohmori, Kazuo Kuramoto, Junji Kobayashi