Abstract: An apparatus for handling or inspecting a sensitive material such as a semiconductor wafer or mask in a self-contained environment, such that the apparatus can be used outside a clean room. The apparatus incorporates a standardized mechanical interface for transferring the wafers or other sensitive material to and from the apparatus in a box having a cover, a bottom, a latch assembly releasably connecting and sealing the cover to the bottom, and a carrier such as a cassette for supporting the wafers. The apparatus includes a base and a canopy attached to the base so as to create an enclosed space between the base and canopy. The canopy includes a port door releasably secured to the canopy, the port door including an upper surface adapted for supporting the bottom of the box. The apparatus also includes a manipulator and electronic control for controlling the manipulator.