Abstract: A MEMS inertial delay device having a substrate layer, an intermediate layer and a device layer. A plurality of freely moveable interlocking masses are formed in the device layer along with springs which connect the masses to first and second supports. Movement of a first one of the interlocked masses, due to a shock event, allows subsequent masses to move, with a last mass including an activation member, movement of which causes operation of a mechanism, such as movement of a lock in a safe/arm arrangement in a munition round.

Abstract: The invention comprises a micromechanical shock sensor that is formed on the surface of a micro-substrate. A moveable proof mass is formed on the surface with at least one spring connected to the proof mass and the surface. The spring allows the proof mass to move a predetermined distance. Latching means are formed on the surface the predetermined distance from the proof mass. When the sensor is subjected to a sufficient shock, the proof mass moves and contacts the latching means. An indicator means is provided to allow this contact to be readily known by the user.

Abstract: A micromechanical device that takes a vertical force to a micro substrate that results into a vertical motion and translates that vertical motion into horizontal motion. A pit is etched onto a micro substrate where the walls of the pit meet the floor of the pit at less than a 90° angle. A vertical force is applied to a structure to push it along the angled wall of the pit and as the structure reaches the bottom of the pit the vertical motion is translated into horizontal motion. By attaching a spring or similar mechanism to the structure, one can store the horizontal momentum for later use by latching the structure in some way before the spring can pull the structure back into its original position.