Abstract: A workpiece holder for semiconductor workpieces during treatment with a substantially cylindrical casing shaped like a hockey puck having an upper surface for receiving a workpiece, a lower surface, at least one bore between the surfaces for applying a vacuum and a hollow interior for a heat absorbing composition preferably one which melts above ambient temperature but below temperatures which might damage workpieces. Suitable compositions include Glauber's salt, and calcium chloride hexahydrate. In one embodiment, curved, substantially radially extending vanes are preferably provided in the interior space for causing radial flow when the casing is rotated or oscillated. In a second embodiment, a plurality of bores extend between a manifold which extends radially and a plurality of circumferential grooves.

Abstract: A method and apparatus for transporting workpieces during surface altering treatment in which each workpiece is mounted on a holder which moves along a guide slot forming a non-circular, closed path. A double sprocket chain extending along one side of the slot engages a gear of each workholder for moving the holders along the slot as the double chain is driven. A second chain on the other side of the slot also engages the gear to rotate the holders as they move along the slot. Links connect the holders and cover the portions of the slot not covered by the upper surfaces of the holders on which the workpieces rest. The workpieces are thus uniformly treated, for example, coated.