Abstract: A pressure gauge for measuring pressure in a vacuum chamber includes a flange couplable with the vacuum chamber, a pressure sensor configured to measure pressure, an air valve between the flange and the pressure sensor, and a vibration dampening assembly configured to dampen vibration in the pressure gauge. A sputtering system for sputter deposition includes a sputter chamber and the pressure gauge. The flange of the pressure gauge is coupled with the sputter chamber. A method of measuring pressure in a vacuum chamber with the pressure gauge includes coupling the flange with the vacuum chamber, dampening vibration in the pressure gauge with the vibration dampening assembly, and obtaining a pressure measurement from the pressure sensor.

Abstract: Various aspects of the present invention provide a testing apparatus and methods for testing a bellows of a sputter machine for air leakage. One such testing apparatus is configured to simulate conditions of the sputter machine and thereby test a bellows for air leakage in both a compressed and an uncompressed configuration. Accordingly, a bellows can be ensured to be in satisfactory working condition before it is installed in the gate valve assembly and also tested for air leakage after removal from the gate valve assembly.