Abstract: The present disclosure provides a process chamber and a semiconductor process apparatus. The process chamber is applied in the semiconductor process apparatus and includes a chamber body, a base, and a chuck assembly. The reaction chamber is formed in the chamber body. The base is located in the reaction chamber. The chuck assembly is connected to the base and configured to carry a wafer. The base includes a base body and a plurality of cantilevers. The plurality of cantilevers are arranged evenly along the circumference of the base body. Each cantilever is connected to the inner wall of the chamber body and the outer wall of the base body. The chamber body, the base body, and the cantilever have an integral structure and are made of a material having the electrical conductivity and the thermal conductivity.

Abstract: The present disclosure provides an impedance-matching method applied to a semiconductor process apparatus, an impedance-matching device, and the semiconductor process apparatus. The impedance-matching method includes adjusting a parameter value of an adjustable element of an impedance-matching device to a preset initial value at beginning of a process, when a radio frequency (RF) power supply is powered on, adjusting the parameter value of the adjustable element according to a pre-stored optimal matching path corresponding to the process, and adjusting the parameter value of the adjustable element using an automatic matching algorithm after reaching end time of the preset matching period until impedance-matching is achieved. The optimal matching path includes parameter values of the adjustable element corresponding to different moments in a preset matching period.

Abstract: The present invention discloses a pullout resistance measuring device and method based on an anchor plate foundation of a submarine slope site. The measuring device includes a support, a moving beam, a hoisting mechanism, a cylinder device, a pulley assembly, a soil sample, a spiral anchor, a traction rope and a force measuring device, where the moving beam is movably mounted on the support; the hoisting mechanism is movably mounted on the moving beam; the cylinder device includes a cylinder; the pulley assembly is movably mounted on the cylinder corresponding to the vertical slit; the soil sample is filled in the cylinder; the spiral anchor is buried in the soil sample; one end of the traction rope is connected to the hoisting mechanism, and the other end is directly connected to the spiral anchor; and the force measuring device is arranged on the traction rope.

Abstract: The present disclosure belongs to the field of pharmaceutical preparations and relates to the design of a series of lipophilic derivatives by using wild-type penetrating peptide penetratin. These penetratin derivatives have a strong ability to penetrate the ocular tissues and do not cause ocular tissue toxicity. As ocular absorption enhancers, non-invasive routes could be used to achieve intraocular drug delivery and increase the ocular bioavailability of drugs. These penetratin derivatives and the ophthalmic drug delivery system constructed by them are used for eye drop administration, which could replace the intraocular injection with poor patients compliance, which greatly enhances the convenience and safety of the treatment of intraocular and fundus diseases.

Abstract: Provided is a road structure reconstructed from large-scale independent underground garage and a construction method, which solves the problem of a newly constructed urban expressway passing through large underground space. The technical point is a construction method for the road structure reconstructed from large-scale independent underground garage, including the following steps: S100: segmentation for the garage, S200: preparation before construction: the materials and equipment required for construction are transported to the site, and the construction site is cleaned, S300: reconstruction for the front section, S400: reconstruction for the middle section, S500: reconstruction for the rear section. The inventiveness of the present disclosure is the application of segmentation construction, the front section is completely obsoleted, a transition section is provided at the middle, and the design of the rear section adopts a double-deck road, thus the original underground garage structure is fully utilized.

Abstract: The present invention belongs to the field of pharmaceutical formulations, and relates to a composition comprising a derivative of a wild-type cell-penetrating peptide penetratin and a drug having positive charge under physiological pH conditions. The derivative of the wild-type cell-penetrating peptide penetratin is a lipophilic derivative designed by using the wild-type cell-penetrating peptide penetratin, and the molecule is positively charged as a whole under physiological pH conditions. Said composition of the present invention, as an ocular drug delivery system, can enable a drug positively charged under physiological pH conditions to be absorbed to the posterior segment of the eye by means of eye dropping, thereby providing a new route for achieving ocular delivery of a drug positively charged under physiological pH conditions.

Abstract: Disclosed is a pullout force measurement test device based on an anchor group effect of a marine pipeline, and a measurement method. The test device includes a support frame, a winch, a lifting plate, an upper hanging rope, a force measuring mechanism mounted on the upper hanging rope, two anchor plate mechanisms, and two lower hanging ropes, where each pair of the lower hanging ropes and the anchor plate mechanisms are located on both sides of the upper hanging rope; each anchor plate mechanism includes a model box, a soil sample filled in the model box, an anchor plate embedded in the soil sample, and a pulley assembly used for adjusting a pullout angle of the anchor plate; one end of each lower hanging rope is connected to the lifting plate, and the other end thereof is connected to the anchor plate of the corresponding anchor plate mechanism.

Abstract: A test device and method for studying influence of external load on soil arching effect of shield tunnel, including a test chamber, a tunnel model and a control module. The tunnel model, including segments which are meshed with each other and can move relatively, the tunnel model is installed in the middle of the test chamber, and all sides of the tunnel model is filled with a test soil, the control module, including a set of deceleration motors and a variable cross-section guide rod, the variable cross-section guide rod is inserted into the tunnel model, which can reduce the diameter of the tunnel model, resulting in ground loss and soil arching effect.

Abstract: A pulse modulation system of a radio frequency (RF) power supply includes a modulation output circuit and a frequency adjustment circuit. The modulation output circuit is configured to modulate an output signal of the RF power supply and output a pulse modulation RF signal. Each pulse cycle of the pulse modulation RF signal includes a pulse-on phase and a pulse-off phase. An overshoot sub-phase is set in an initial preset time of the pulse-on phase. The frequency adjustment circuit is electrically connected to the modulation output circuit. The frequency adjustment circuit is configured to adjust an RF frequency of the pulse modulation RF signal of the overshoot sub-phase to cause a reflected power of the overshoot sub-phase to satisfy a preset reflected power or a reflected coefficient to satisfy a preset reflected coefficient.

Abstract: A test device and method for studying influence of external load on soil arching effect of shield tunnel, including a test chamber, a tunnel model and a control module. The tunnel model, including segments which are meshed with each other and can move relatively, the tunnel model is installed in the middle of the test chamber, and all sides of the tunnel model is filled with a test soil, the control module, including a set of deceleration motors and a variable cross-section guide rod, the variable cross-section guide rod is inserted into the tunnel model, which can reduce the diameter of the tunnel model, resulting in ground loss and soil arching effect.

Abstract: A coil structure includes a coil set including a first coil and a second coil. The first coil and the second coil are wound to form an annular area. A first end of the first coil and a first end of the second coil are close to an inner ring of the annular area. A second end of the first coil and a second end of the second coil are close to an outer ring of the annular area. The first end of the first coil is electrically connected to the first end of the second coil. A first projection-of the first coil on a plane perpendicular to an axial direction of the coil structure and a second projection of the second coil on the plane are mirror-symmetrical to each other.

Abstract: A semiconductor reaction chamber includes a chamber body, a dielectric window, a gas inlet member, a carrier, an upper radio frequency assembly, and a plurality of ultraviolet light generation devices. The dielectric window is arranged at a top of the chamber body. The gas inlet member is arranged at a center position of the dielectric window and configured to introduce a process gas into the chamber body. The carrier is arranged inside the chamber body and configured to carry a to-be-processed wafer. The upper radio frequency assembly is arranged above the chamber body and configured to ionize the process gas introduced into the chamber body to generate a plasma and first ultraviolet light. The plurality of ultraviolet light generation devices is arranged between the dielectric window and the carrier and around the gas inlet member and configured to generate second ultraviolet light radiating toward the carrier.

Abstract: An upper electrode mechanism of a semiconductor process apparatus includes a radio frequency (RF) coil including two parallelly-connected branches, two current sensors each arranged on one of the branches and configured to detect a branch current of a corresponding one of the two branches, and a current adjustment device connected to the RF coil and configured to adjust the branch current of at least one branch of the two branches according to the detected branch currents to cause the branch currents of the two branches to be equal.

Abstract: The present disclosure provides a semiconductor reaction chamber and an atomic layer plasma etching apparatus. The semiconductor reaction chamber includes a dielectric window and a reaction chamber body. The spray head is arranged between the dielectric window and the top wall of the reaction chamber body, and divides the plasma generation area into an upper strong plasma area and a lower weak plasma area. Moreover, a plurality of through-holes are distributed in the central area of the spray head and configured to allow the plasma in the strong plasma area to pass through. A first gas channel is arranged in an edge area of the spray head. The process reaction gas inlet member is located on a side where the gas inlet end of the first gas channel of the spray head is located. A second gas channel is arranged in the process reaction gas inlet member.

Abstract: Embodiments of this application provide a data sending method, an apparatus, a device, and a readable storage medium. A server determines a first transmission point from a coordinated set, and determines a first downlink sending weight of the first transmission point. Then, the server determines a second downlink sending weight of a second transmission point based on the first downlink sending weight, and sends the second downlink sending weight to the second transmission point. When sending a data stream to an electronic device, the second transmission point determines a downlink sending weight corresponding to the data stream from a matrix, weights the data stream, and sends the weighted data stream to the electronic device.

Abstract: The present disclosure provides an induction coil assembly and a reaction chamber. The induction coil assembly includes an induction coil arranged over a dielectric window of the reaction chamber. Two ends of the induction coil include a power input end and a ground end, respectively. A vertical spacing between the two ends of the induction coil and the dielectric window is greater than a vertical spacing between a portion between the two ends of the induction coil and the dielectric window. The induction coil and the reaction chamber provided by the present disclosure may reduce the capacitive coupling of the two ends of the induction coil by ensuring that the coupling strength of an RF magnetic field satisfies the requirement to reduce sputtering on the dielectric window and improve process results.

Abstract: A textured surface of oil and gas equipment includes a first substrate, an antiwear coating, and a second substrate, and further includes a texture, where the texture includes a first texture and/or a second texture; the first substrate and the second substrate are capable of moving relative to each other when operating, the first texture is arranged on a surface of the first substrate that is in contact with the antiwear coating, the second texture is arranged on a surface of the antiwear coating that is in contact with the second substrate. A method for machining the textured surface of oil and gas equipment is provided, which improves various performances of the oil and gas equipment such as antifriction, wear resistance, and corrosion resistance by combining a coating with a texture, so as to prolong the service life of the oil and gas equipment, increase oil and gas production efficiency.

Abstract: The present disclosure provides a radio frequency (RF) source control method. An RF source includes at least one pair of a main power supply and a secondary power supply with a same frequency. The RF source control method includes dividing each process step of process steps of a plasma process into a plurality of time periods, and when performing each process step, maintaining a common exciter (CEX) phase locking delay angle of the at least one pair of the main power supply and the secondary power supply corresponding to each of the time periods at a predetermined value to provide an increased angular distribution uniformity of plasma. The RF source control method provided by the present disclosure may be used to adjust plasma distribution above a to-be-processed workpiece to average the plasma angular direction distribution of the entire process step as a whole to increase process uniformity of the to-be-processed workpiece.

Abstract: A VCSEL device includes an N-type metal substrate and laser-emitting units on the N-type metal substrate. Each laser-emitting unit includes an N-type contact layer in contact with the N-type metal substrate; an N-type Bragg reflector layer in contact with the N-type contact layer; a P-type Bragg reflector layer above the N-type Bragg reflector layer; an active emitter layer between the P-type Bragg reflector layer and the N-type Bragg reflector layer; a current restriction layer between the active emitter layer and the P-type Bragg reflector layer; a P-type contact layer in contact with the P-type Bragg reflector layer; and an insulation sidewall surrounding all edges of the N-type and P-type Bragg reflector layers, the N-type and P-type contact layers, the active emitter layer and the current restriction layer. A P-type metal substrate has through holes each aligned with a current restriction hole of a corresponding laser-emitting unit.

Abstract: The present invention provides aqueous formulations containing an anti-infection agent, a biocompatible polysaccharide, an osmotic pressure regulator, a pH regulator, and water, wherein a gel containing the therapeutic agent is formed in situ upon instillation of the formulations onto the skin and a body cavity of a subject. The formulations of this invention are useful for treating infectious diseases of skin or a body cavity (e.g., eye, nose, or vagina) of a subject.