Abstract: An approach for representing integrated circuit device characteristics using polynomial equations involves analyzing integrated circuit device characterization data in a lookup table form and using an order incremental scheme to determine a polynomial equation of a relatively low-order that satisfies specified accuracy criteria. In situations where a polynomial equation that has an order less than a maximum allowable order cannot be determined, the integrated circuit device characterization data is partitioned into sub-domains and polynomial equations are determined separately for each sub-domain. The separate polynomial equations are then combined to generate a piecewise polynomial equation that represents all of the integrated circuit device characterization data.