Abstract: A humidification system can include a heater base, a humidification chamber, and a breathing circuit. A cartridge can be removably coupled to the heater base. The cartridge can include various sensors, probes, sensor wire connectors, heater wire connectors, and/or other features. The cartridge can include features configured to mate with corresponding features on the humidification chamber and the heater base. The cartridge includes a memory, such as an EEPROM, or other suitable storage device. When the cartridge is installed on the heater base, the memory is electrically connected to a processor and/or memory of the heater base. Various models of cartridges can be produced for use with different humidification chambers, breathing circuits, and/or therapies. A connector can be configured to couple an inspiratory conduit to an outlet port of the humidification chamber. The connector can provide a pneumatic connection to the outlet port and an electrical connection to the cartridge.

Abstract: A circuit connector for a humidification system, the system comprising a base unit configured to be engaged by a humidification chamber. The circuit connector comprises an inlet to fluidly connect to an outlet of the humidification chamber to receive humidified gases therefrom, an outlet to sealably connect to or integral with a conduit for directing the humidified gases to a user, and an electrical terminal for electrically coupling the circuit connector to an electrical terminal associated with the base unit. The circuit connector may be releasably and lockably connectable to the outlet of the humidification chamber and/or orientation features may control orientation of component parts of the system as they are assembled.

Abstract: The present invention provides a wet scrubber for gas abatement, comprising a scrubbing vessel defining a chamber, a gas inlet for supplying a gas to be scrubbed, and a gas outlet for allowing the egress of a scrubbed gas; the inlet and outlet being in fluid communication with one another; one or more scrubbing fluid supply ports; the wet scrubber comprising at least one distribution element connected to a scrubbing fluid supply port for distributing a scrubbing fluid inside the chamber; wherein at least one said distribution element is a distribution plate comprising a cavity and a plurality of apertures arranged to allow scrubbing fluid to flow from the cavity.

Abstract: An inlet assembly for an abatement apparatus includes: an effluent stream conduit configured to convey an effluent stream along a major direction of flow within the effluent stream conduit; an inlet nozzle fluidly coupled with the effluent stream conduit and configured to convey the effluent stream received from the effluent stream conduit to an abatement chamber of the abatement apparatus; and a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle. A line-of-sight flow from the effluent stream conduit into the inlet nozzle is prevented by the baffle and the effluent stream instead follows a non-line-of-sight or diversionary path from the effluent stream conduit into the inlet nozzle, which improves DRE.

Abstract: Apparatus and methods are disclosed. The apparatus comprises: an abatement chamber of an abatement apparatus which treats an effluent stream from a semiconductor processing tool to provide a combusted effluent stream having effluent particles; and a first atomiser located downstream of the abatement chamber, the first atomiser being configured to produce droplets having a droplet size based on a particle size of the effluent particles to be removed from the combusted effluent stream. In this way, the atomizer may produce droplets which combine with or adhere to the effluent particles which assists in the removal of the effluent particles from the combusted effluent stream.

Abstract: A method of cleaning a gas inlet nozzle of an abatement burner combustion chamber. The abatement burner intermittently receives gas for combustion from a feed process. The nozzle comprises a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position wherein the cleaning member is outside a path of a flame associated with the nozzle, to a second cleaning position wherein the cleaning member is in a path of the flame associated with the nozzle. The method comprises the steps of: a. identifying when the nozzle is out of use; b. moving the cleaning member from the first position to the second position while the nozzle is out of use; and c. returning the cleaning member to the first position before nozzle is in use.

Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; a combustion characteristic monitor operable to determine combustion performance of the radiant burner by monitoring infra-red radiation emitted from the combustion surface; and a radiant burner controller operable to control operation of the radiant burner in dependence upon combustion performance determined by the combustion characteristic monitor. Accordingly, aspects recognize that if a burner is suffering from an excessive flow of air the burner pad or combustion surface will typically cool, which results in an increase in unwanted emissions in the exhaust produced by a radiant burner. The cooling also results in a reduction in infrared radiation determined by the combustion surface.

Abstract: The present invention provides a method of treating an exhaust gas stream 12 from a processing chamber 10. The method comprises the steps of: conveying the exhaust gas from the processing chamber using a vacuum pumping arrangement 11, 22 or atmospheric line; abating the exhaust gas in an abatement region 18 of an abatement device 14; and injecting a cooling agent, such as a liquid 26, downstream of the abatement region to cool the abated gases in a cooling region 24 by phase change of the cooling agent.

Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; a combustion characteristic monitor operable to determine combustion performance of the radiant burner by monitoring infra-red radiation emitted from the combustion surface; and a radiant burner controller operable to control operation of the radiant burner in dependence upon combustion performance determined by the combustion characteristic monitor. Accordingly, aspects recognise that if a burner is suffering from an excessive flow of air the burner pad or combustion surface will typically cool, which results in an increase in unwanted emissions in the exhaust produced by a radiant burner. The cooling also results in a reduction in infrared radiation determined by the combustion surface.

Abstract: Chemical vapor deposition apparatus comprises a process chamber, a bubbler for supplying a volatile precursor to the chamber, a vacuum pump for drawing an exhaust gas from the process chamber, an abatement device for treating the exhaust gas, and a bypass line for conveying the precursor from the bubbler to the abatement device, the bypass line bypassing both the process chamber and the vacuum pump.

Abstract: The present invention provides a method of treating an exhaust gas stream 12 from a processing chamber 10. The method comprises the steps of: conveying the exhaust gas from the processing chamber using a vacuum pumping arrangement 11, 22 or atmospheric line; abating the exhaust gas in an abatement region 18 of an abatement device 14; and injecting a cooling agent, such as a liquid 26, downstream of the abatement region to cool the abated gases in a cooling region 24 by phase change of the cooling agent.

Abstract: A pilot (10) is shown for igniting a combustible fluid stream. The pilot comprises an inlet (12), for receiving a fuel gas (14), including a fuel and air/oxygen mixture, into the pilot. Ignition means (16), for example a spark igniter or an ignition electrode, are provided for igniting the fuel gas (14). A generally annular conduit (18) is open along an annular extent forming a circumferential aperture (20). The conduit (18) conveys fuel gas from the inlet to the circumferential aperture. When the fuel gas flowing out of the circumferential aperture (20) is ignited a continuous annular pilot flame is generated radially of the conduit.

Abstract: A method is described for treating a gas stream containing either fuel only or both fuel and oxidant gases, such as hydrogen, nitrous oxide or a hydrocarbon gas. The gas stream is conveyed through a vacuum pumping arrangement comprising a plurality of pumping stages. Either immediately before or immediately after the final pumping stage, the steps of adding a gaseous oxidant to the gas stream and oxidising the fuel gas are performed. By treating the gas stream in this manner, the risk of uncontrolled combustion of the fuel gas can be minimised.

Abstract: Apparatus is described for treating an effluent fluid stream from a semiconductor manufacturing process tool. The apparatus comprises a combustion chamber, means for heating the combustion chamber, and a nozzle for injecting the effluent stream into the combustion chamber. The apparatus is configured to enable a fuel and an oxidant to be selectively injected into the effluent stream as required to optimise the combustion conditions for a particular effluent stream. In one to embodiment, a lance projecting into the nozzle selectively injects an oxidant into the effluent stream, and a sleeve surrounding the nozzle selectively injects a fuel into the effluent stream.