Patents by Inventor Gary R. Donaldson

Gary R. Donaldson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Workpiece distribution and processing in a high throughput stacked frame
    Publication number: 20020137346
    Abstract: An integrated workpiece vacuum processing system for processing semiconductor workpieces is provided using a stacked chamber design. The processing system comprises a multiple chamber support unit having a plurality of processing chamber support bays arranged in rows and columns wherein a vacuum processing chamber module is received in each support bay and a transfer chamber is coupled to the plurality of processing chamber modules.
    Type: Application
    Filed: March 12, 2001
    Publication date: September 26, 2002
    Applicant: APPLIED MATERIALS. INC.
    Inventors: Gary R. Donaldson, William Wang