Patents by Inventor Gary W. Rubolff

Gary W. Rubolff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for tuning field for plasma processing using corrected electrode
    Patent number: 5716486
    Abstract: A device for reducing plasma irregularities includes an electrode assembly capable of applying an electric potential to said plasma. The electrode assembly includes a portion for reducing the plasma irregularities. The portion which reduces the plasma irregularities includes alternately a buried portion which is capable of altering the potential within the buried element, or else a conditioned portion of the surface which controls reflectivity and/or emissivity of portions of a surface of the electrode assembly differently.
    Type: Grant
    Filed: April 19, 1996
    Date of Patent: February 10, 1998
    Inventors: Gary S. Selwyn, Manoj Dalvie, C. Richard Guarnieri, James J. McGill, Gary W. Rubolff, Maheswaran Surendra