Patents by Inventor Gary William Gray

Gary William Gray has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Creation of porosity in low-k films by photo-disassociation of imbedded nanoparticles
    Patent number: 7510982
    Abstract: Porous dielectric layers are produced by embedding and removing nanoparticles in composite dielectric layers. The pores may be produced after the barrier material, the metal or other conductive material is deposited to form a metallization layer. In this manner, the conductive material is provided with a relatively smooth continuous surface on which to deposit.
    Type: Grant
    Filed: June 6, 2005
    Date of Patent: March 31, 2009
    Assignee: Novellus Systems, Inc.
    Inventors: Nerissa S. Draeger, Gary William Gray