Patents by Inventor Genadi Gabi Brontvein

Genadi Gabi Brontvein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reducing a temperature difference between a sample and a chuck of an electron beam tool
    Patent number: 11264203
    Abstract: A method, a non-transitory computer readable medium and a system for reducing a temperature difference between a sample and a chuck of an electron beam tool. The method may include determining a target temperature of samples located at the load port of the electron beam tool; setting a temperature of the samples, located at the load port, to the target temperature; moving the sample from the load port to the chuck, the chuck is located within a vacuum chamber, the sample belongs to the samples; and positioning the sample on the chuck, wherein when positioned on the chuck, a temperature of the sample substantially equals a temperature of the chuck.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: March 1, 2022
    Assignee: Applied Materials Israel Ltd.
    Inventors: Genadi Gabi Brontvein, Avraham Aboody
  • REDUCING A TEMPERATURE DIFFERENCE BETWEEN A SAMPLE AND A CHUCK OF AN ELECTRON BEAM TOOL
    Publication number: 20220051867
    Abstract: A method, a non-transitory computer readable medium and a system for reducing a temperature difference between a sample and a chuck of an electron beam tool. The method may include determining a target temperature of samples located at the load port of the electron beam tool; setting a temperature of the samples, located at the load port, to the target temperature; moving the sample from the load port to the chuck, the chuck is located within a vacuum chamber, the sample belongs to the samples; and positioning the sample on the chuck, wherein when positioned on the chuck, a temperature of the sample substantially equals a temperature of the chuck.
    Type: Application
    Filed: August 17, 2020
    Publication date: February 17, 2022
    Inventors: Genadi Gabi Brontvein, Avraham Aboody