Patents by Inventor Gentoku Kou

Gentoku Kou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6450288
    Abstract: An exposure apparatus capable of minimizing low-frequency noise intruding into a chamber from the outside, wherein a partition of the chamber comprises a structure formed by sandwiching a ceramic honeycomb structural material (18) between a pair of steel or aluminum plates (16), the partition having a very high sound-proofing effect against low-frequency noise owing to its rigidity.
    Type: Grant
    Filed: July 28, 2000
    Date of Patent: September 17, 2002
    Assignee: Nikon Corporation
    Inventors: Kyoichi Akiyama, Gentoku Kou, Makoto Ogawa, Masaru Hachisuka, Takashi Ozaki, Yoshinori Ogawa, Isamu Takeuchi