Patents by Inventor Genyi Wang
Genyi Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9502497Abstract: A method for preparing a power diode, including: providing a substrate (10), growing a N type layer (20) on the front surface of the substrate (10); forming a terminal protecting ring; forming an oxide layer (30), knot-pushing to the terminal protecting ring; forming a gate oxide layer (60), depositing a poly-silicon layer (70) on the gate oxide layer (60); depositing a SiO2 layer (80) on the surface of the poly-silicon layer (70) and a oxide layer (50); forming a N type heavy doped region (92); forming a P+ region; removing a photoresist, implanting P type ions using the SiO2 layer (80) as a mask layer, and forming a P type body region; heat annealing; forming a side wall structure in the opening of the poly-silicon layer (70), the gate oxide layer (60) being etched, and removing the SiO2 layer (80); and processing a front surface metallization and a back surface metallization treatment.Type: GrantFiled: October 22, 2014Date of Patent: November 22, 2016Assignee: CSMC Technologies Fab1 Co., Ltd.Inventors: Genyi Wang, Xiaoshe Deng, Shengrong Zong, Dongfei Zhou
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Patent number: 9502534Abstract: A preparation method for a power diode, comprising: providing a substrate (10), the substrate (10) having a front surface and a back surface opposite to the front surface, an N-type layer (20) growing on the front surface of the substrate (10), and the N-type layer (20) having a first surface deviating from the substrate (10); forming a terminal protection ring (31, 32, 33); forming an oxide layer (50), and performing knot pushing on the terminal protection ring (31, 32, 33); conducting photoetching using a photoetching plate of an active region and etching the oxidation layer (50) of the active region, and forming a gate oxide layer (60) on the first surface of the N-type layer (20) of the active region; depositing on the gate oxide layer (60) to form a polysilicon layer (70); conducting photoetching using a polysilicon photoetching plate, taking a photoresist (40) as a mask layer to inject P-type ions into the N-type layer (20), and forming a P-type body region (82) beneath the polysilicon layer (70) througType: GrantFiled: September 12, 2014Date of Patent: November 22, 2016Assignee: CSMC Technologies Fab1 Co., Ltd.Inventors: Shengrong Zhong, Genyi Wang, Xiaoshe Deng, Dongfei Zhou
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Publication number: 20160308029Abstract: A preparation method for a power diode, comprising: providing a substrate (10), the substrate (10) having a front surface and a back surface opposite to the front surface, an N-type layer (20) growing on the front surface of the substrate (10), and the N-type layer (20) having a first surface deviating from the substrate (10); forming a terminal protection ring (31, 32, 33); forming an oxide layer (50), and performing knot pushing on the terminal protection ring (31, 32, 33); conducting photoetching using a photoetching plate of an active region and etching the oxidation layer (50) of the active region, and forming a gate oxide layer (60) on the first surface of the N-type layer (20) of the active region; depositing on the gate oxide layer (60) to form a polysilicon layer (70); conducting photoetching using a polysilicon photoetching plate, taking a photoresist (40) as a mask layer to inject P-type ions into the N-type layer (20), and forming a P-type body region (82) beneath the polysilicon layer (70) througType: ApplicationFiled: September 12, 2014Publication date: October 20, 2016Inventors: Shengrong Zhong, Genyi Wang, Xiaoshe Deng, Dongfei Zhou
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Publication number: 20160307994Abstract: A method for preparing a power diode, including: providing a substrate (10), growing a N type layer (20) on the front surface of the substrate (10); forming a terminal protecting ring; forming an oxide layer (30), knot-pushing to the terminal protecting ring; forming a gate oxide layer (60), depositing a poly-silicon layer (70) on the gate oxide layer (60); depositing a SiO2 layer (80) on the surface of the poly-silicon layer (70) and a oxide layer (50); forming a N type heavy doped region (92); forming a P+ region; removing a photoresist, implanting P type ions using the SiO2 layer (80) as a mask layer, and forming a P type body region; heat annealing; forming a side wall structure in the opening of the poly-silicon layer (70), the gate oxide layer (60) being etched, and removing the SiO2 layer (80); and processing a front surface metallization and a back surface metallization treatment.Type: ApplicationFiled: October 22, 2014Publication date: October 20, 2016Inventors: Genyi Wang, Xiaoshe Deng, Shengrong Zong, Dongfei Zhou
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Publication number: 20160307995Abstract: An insulated gate bipolar transistor (100) is provided. A substrate (10) of the insulated gate bipolar transistor (100) is of an N type. A P-type region (16) is disposed on a back of the N-type substrate. A back metal structure (18) is disposed on a back of the P-type region (16). A terminal protection ring is disposed in a terminal structure. A polysilicon gate (31) is disposed on a front surface of the substrate (10) in an active region. Sidewalls (72) are disposed at two sides of the polysilicon gate (31) on the substrate (10). An interlayer medium (81) covered with the polysilicon gate (31) and the sidewalls (72) is disposed on the substrate (10). The interlayer medium (81) is covered with a metal lead wire layer (91). An N-type carrier enhancement region (41) is disposed in the substrate (10) in the active region. A P-type body region (51) is disposed in the carrier enhancement region (41). An N-type heavily doped region (61) is disposed in the P-type body region (51).Type: ApplicationFiled: August 25, 2014Publication date: October 20, 2016Inventors: Shengrong Zhong, Dongfei Zhou, Xiaoshe Deng, Genyi Wang
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Patent number: 9443926Abstract: A field-stop reverse conducting insulated gate bipolar transistor and a manufacturing method thereof. The transistor comprises a terminal structure (200) and an active region (100). An underlayment of the field-stop reverse conducting insulated gate bipolar transistor is an N-type underlayment, the back surface of the underlayment is provided with an N-type electric field stop layer (1), one surface of the electric field stop layer (1) departing from the underlayment is provided with a back-surface P-type structure (10), and the surface of the back-surface P-type structure (10) is provided with a back-surface metal layer (12). A plurality of polysilicon filling structures (11) which penetrate into the electric field stop layer (1) from the back-surface P-type structure (10) are formed in the active region (100).Type: GrantFiled: June 6, 2014Date of Patent: September 13, 2016Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Shuo Zhang, Qiang Rui, Xiaoshe Deng, Genyi Wang
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Publication number: 20160240608Abstract: A field-stop reverse conducting insulated gate bipolar transistor and a manufacturing method thereof. The transistor comprises a terminal structure (200) and an active region (100). An underlayment of the field-stop reverse conducting insulated gate bipolar transistor is an N-type underlayment, the back surface of the underlayment is provided with an N-type electric field stop layer (1), one surface of the electric field stop layer (1) departing from the underlayment is provided with a back-surface P-type structure (10), and the surface of the back-surface P-type structure (10) is provided with a back-surface metal layer (12). A plurality of polysilicon filling structures (11) which penetrate into the electric field stop layer (1) from the back-surface P-type structure (10) are formed in the active region (100).Type: ApplicationFiled: June 6, 2014Publication date: August 18, 2016Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Shuo ZHANG, Qiang RUI, Xiaoshe DENG, Genyi WANG
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Publication number: 20160240528Abstract: An insulated gate bipolar translator (IGBT) with a built-in diode and a manufacturing method thereof are provided.Type: ApplicationFiled: June 9, 2014Publication date: August 18, 2016Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Xiaoshe DENG, Shuo ZHANG, Qiang RUI, Genyi WANG
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Publication number: 20160163841Abstract: A field-stop reverse conducting insulated gate bipolar transistor and a manufacturing method therefor. The transistor comprises a terminal structure (200) and an active region (100). An underlayment of the field-stop reverse conducting insulated gate bipolar transistor is an N-type underlayment, the back surface of the underlayment is provided with an N-type electric field stop layer (1), one surface of the electric field stop layer departing from the underlayment is provided with a back-surface P-type structure (10), and the surface of the back-surface P-type structure is provided with a back-surface metal layer (12). A plurality of notches (11) which penetrate through the back-surface P-type structure (10) from the back-surface metal layer (12) to the electric field stop layer (1) are formed in the active region (100), and metals of the back-surface metal layer (12) are filled into the notches (11) to form a metal structure which extends into the electric field stop layer (1).Type: ApplicationFiled: June 5, 2014Publication date: June 9, 2016Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Shuo ZHANG, Qiang RUI, Genyi WANG, Xiaoshe DENG
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Publication number: 20150155182Abstract: Disclosed is a method for removing a polysilicon protection layer (12) on a back face of an IGBT having a field stop structure (10). The method comprises thermally oxidizing the polysilicon protection layer (12) on the back face of the IGBT until the oxidation is terminated on a gate oxide layer (11) located above the polysilicon protection layer (12) to form a silicon dioxide layer (13), and removing the formed silicon dioxide layer (13) and the gate oxide layer (11) by a dry etching process. The method for removing the protection layer is easier to control.Type: ApplicationFiled: July 25, 2013Publication date: June 4, 2015Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Qiang Rui, Shuo Zhang, Genyi Wang, Xiaoshe Deng
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Patent number: 8927386Abstract: The present invention provides a method for manufacturing a deep-trench super PN junction. The method includes: a deposition step for forming an epitaxial layer on a substrate; forming a first dielectric layer and a second dielectric layer in sequence on the epitaxial layer; forming deep trenches in the epitaxial layer; completely filling the deep trenches with an epitaxial material and the epitaxial material is beyond the second dielectric layer; filling the entire surface of the second dielectric layer and the epitaxial layer such as Si using a third dielectric to from a surface filling layer with a predetermined height; etching back on the surface filling layer to the interface of the first dielectric layer and the epitaxial layer; and a removing step for removing the first dielectric layer, the second dielectric layer and the surface filling layer to planarize Si epitaxial material.Type: GrantFiled: May 31, 2012Date of Patent: January 6, 2015Assignees: CSMC Technologies FAB1 Co., Ltd., CSMC Technologies FAB2 Co., Ltd.Inventors: Tzong Shiann Wu, Genyi Wang, Leibing Yuan, Pengpeng Wu
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Publication number: 20130196489Abstract: The present invention provides a method for manufacturing a deep-trench super PN junction. The method includes: a deposition step for forming an epitaxial layer on a substrate; forming a first dielectric layer and a second dielectric layer in sequence on the epitaxial layer; forming deep trenches in the epitaxial layer; completely filling the deep trenches with an epitaxial material and the epitaxial material is beyond the second dielectric layer; filling the entire surface of the second dielectric layer and the epitaxial layer such as Si using a third dielectric to from a surface filling layer with a predetermined height; etching back on the surface filling layer to the interface of the first dielectric layer and the epitaxial layer; and a removing step for removing the first dielectric layer, the second dielectric layer and the surface filling layer to planarize Si epitaxial material.Type: ApplicationFiled: May 31, 2012Publication date: August 1, 2013Inventors: Tzong Shiann Wu, Genyi Wang, Leibing Yuan, Pengpeng Wu