Abstract: The invention relates to a method for fabricating a detection device, comprising the following steps: producing thermal detectors and an encapsulating structure by way of mineral sacrificial layers; partially removing the mineral sacrificial layers, by wet chemical etching in an acid medium, so as to free the thermal detectors and to obtain a peripheral wall, and to free an upper portion of the encapsulating thin layer; the peripheral wall then having a lateral recess resulting in a vertical enlargement of the cavity, between the readout substrate and the upper portion, this lateral recess defining an intermediate area; producing reinforcing pillars, arranged in the intermediate area around the matrix-array of thermal detectors.

Abstract: A process for fabricating a detecting device includes producing a getter pad based on amorphous carbon resting on a mineral sacrificial layer that covers a thermal detector and producing a thin encapsulating layer that rests on the mineral sacrificial layer and that covers an upper face and sidewalls of the getter pad. The mineral sacrificial layer is removed via a first chemical etch, and a protective segment of the getter pad is removed via a second chemical etch.

Abstract: A process for manufacturing a detection device having at least one thermal detector covered by a mineral sacrificial layer, at least one getter portion covered by a carbon-based sacrificial layer, and a thin encapsulation layer surrounding the thermal detector and the getter portion includes a making a through-opening extending through the mineral sacrificial layer and opening on the substrate. The carbon-based sacrificial layer is deposited so as to cover the getter portion located in the through-opening and to entirely fill the through-opening.

Abstract: A process for fabricating a device for detecting electromagnetic radiation, including an encapsulation structure including an encapsulation layer on which a relief rests, and a sealing layer, which has a local breakage in continuity at the relief.

Abstract: The invention relates to a process for fabricating a device for detecting electromagnetic radiation, comprising an encapsulation structure (20) comprising an encapsulation layer (21) on which a relief (23) rests, and a sealing layer (24), which has a local breakage in continuity at the relief (23).

Abstract: A device for detecting electromagnetic radiation is provided, including a substrate; a matrix of thermal detectors disposed on the substrate; and a structure encapsulating the matrix of thermal detectors, including an encapsulating layer extending continuously around and above the matrix of thermal detectors so as to define with the substrate a cavity in which the matrix of thermal detectors is disposed, the encapsulating layer including at least one internal bearing section, which bears directly against the substrate between two adjacent thermal detectors of said matrix, said at least one internal bearing section including a sidewall and a peripheral wall, the sidewall being separate from the peripheral wall in a plane parallel to a plane of the substrate, and the peripheral wall encircling the matrix of thermal detectors.

Abstract: A device for detecting electromagnetic radiation, including a substrate; at least one thermal detector, placed on the substrate, including an absorbing membrane suspended above the substrate; and an encapsulating structure encapsulating the thermal detector, including an encapsulating layer extending around and above the thermal detector so as to define with the substrate a cavity in which the thermal detector is located; wherein the encapsulating layer includes at least one through-orifice that is what is referred to as an exhaust vent, each exhaust vent being placed so that at least one thermal detector has a single exhaust vent located facing the corresponding absorbing membrane, preferably plumb with the center of said absorbing membrane.

Abstract: A device for detecting electromagnetic radiation is provided, including a substrate; at least one thermal detector placed on the substrate; and an encapsulating structure encapsulating the detector, including a thin encapsulating layer of a material that is transparent to said radiation, extending around and above the detector so as to define with the substrate a cavity in which the detector is located; wherein the thin encapsulating layer comprises a peripheral wall that encircles the detector, and that has a cross section, in a plane parallel to the plane of the substrate, of square or rectangular shape, corners of which are rounded.

Abstract: The invention relates to a device for detecting electromagnetic radiation, comprising: a substrate; a matrix of thermal detectors, which matrix is placed on the substrate; and a detector-encapsulating structure, including an encapsulating layer extending around and above the matrix of detectors so as to define with the substrate a cavity in which the matrix of detectors is located; in which the encapsulating layer comprises at least one section, which is what is referred to as an internal bearing section, located between two adjacent detectors, and which bears directly against the substrate.

Abstract: The invention relates to a device for detecting electromagnetic radiation, comprising: a substrate (3); at least one thermal detector (2), placed on the substrate; and an encapsulating structure (5) encapsulating the detector, including a thin encapsulating layer (6) made of a material that is transparent to said radiation, extending around and above the detector so as to define with the substrate a cavity (4) in which the detector (2) is located; characterized in that the thin encapsulating layer comprises a peripheral wall (6a) that encircles the detector, and that has a cross section, in a plane parallel to the plane of the substrate, of square or rectangular shape the corners (6a-3) of which are rounded.

Abstract: A device for detecting electromagnetic radiation, including a substrate; at least one thermal detector, placed on the substrate, including an absorbing membrane suspended above the substrate; and an encapsulating structure encapsulating the thermal detector, including an encapsulating layer extending around and above the thermal detector so as to define with the substrate a cavity in which the thermal detector is located; wherein the encapsulating layer includes at least one through-orifice that is what is referred to as an exhaust vent, each exhaust vent being placed so that at least one thermal detector has a single exhaust vent located facing the corresponding absorbing membrane, preferably plumb with the centre of said absorbing membrane.

Abstract: An array bolometric detector for detecting an electromagnetic radiation in a predetermined infrared or terahertz wavelength range, including a substrate, and an array of bolometric microplates for the detection of the radiation, suspended above the substrate by support elements. The detector includes a membrane arranged above each microplate, and having patterns having a refractive index smaller than that of the membrane formed therein. The patterns are placed periodically along at least one axis of the membrane, according to a period shorter than or equal to ? n , where ? is a wavelength to be detected and n is the average refractive index of the medium separating the microplate from the membrane. The width of the patterns along the axis increases from a central location of the membrane towards the periphery thereof.

Abstract: An infrared detection device including an infrared heat detector and a connection pad each spaced apart from an etching stop layer by a non-zero distance substantially equal relatively to each other, wherein first and second electrically conducting vias are respectively electrically connected to first and second portions of a metal line of a penultimate level of electrical interconnections, and wherein an empty space formed in a first inter-metal dielectric layer surrounds the first electrically conducting via and extends under the infrared heat detector.

Abstract: This bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared or terahertz wavelengths comprises a substrate and an array of bolometric micro-plates for detecting said radiation that are suspended above the substrate by support arms. It comprises a metallic membrane located above and around each micro-plate and in which openings are formed; said openings in metallic membrane are periodically located in it along at least one predetermined axis with a period equal to or less than ? n , where ? is a wavelength in the wavelength range that is to be detected and n is the average refraction index of the medium that separates the micro-plate from metallic membrane.

Abstract: An infrared detection device including an infrared heat detector and a connection pad each spaced apart from an etching stop layer by a non-zero distance substantially equal relatively to each other, wherein first and second electrically conducting vias are respectively electrically connected to first and second portions of a metal line of a penultimate level of electrical interconnections, and wherein an empty space formed in a first inter-metal dielectric layer surrounds the first electrically conducting via and extends under the infrared heat detector.

Abstract: An array bolometric detector for detecting an electromagnetic radiation in a predetermined infrared or terahertz wavelength range, including a substrate, and an array of bolometric microplates for the detection of the radiation, suspended above the substrate by support elements. The detector includes a membrane arranged above each microplate, and having patterns having a refractive index smaller than that of the membrane formed therein. The patterns are placed periodically along at least one axis of the membrane, according to a period shorter than or equal to ? n , where ? is a wavelength to be detected and n is the average refractive index of the medium separating the microplate from the membrane. The width of the patterns along the axis increases from a central location of the membrane towards the periphery thereof.

Abstract: A structure for encapsulating at least one electronic device, including at least one first cavity bounded by a support and at least one cap provided on the support and wherein the electronic device is encapsulated, at least one aperture passing through the cap and communicating the inside of the first cavity with at least one portion of getter material provided in at least one second cavity which is arranged on the support and adjacent to the first cavity, at least one part of said portion of getter material being provided on the support or against at least one outer side wall of the first cavity, the first cavity and the second cavity forming together a hermetically sealed volume.

Abstract: Method of operating an actuator (1) for maneuvering a movable element (52), comprising a motor of asynchronous type or of brushless type or comprising a motor associated with a differential brake, and comprising a partially irreversible reduction gear, which comprises a step of establishing a measurement of an operating parameter of the actuator and a step of using this measurement to determine whether the actuator is driving the movable element or whether the actuator is being driven by the movable element, and then a step of implementing first logic for determining an end of travel or an obstacle, or a step of implementing second logic for determining an end of travel or an obstacle, depending on whether the actuator drives the movable element or the actuator is driven by the movable element.

Abstract: A bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared wavelengths includes a substrate; an array of bolometric micro-plates for detecting the radiation suspended above the substrate by support arms; and metallic reflectors formed on the substrate underneath the micro-plates to reflect that portion of the radiation which has passed through said micro-plates without being absorbed by the latter. For each micro-plate, a corresponding reflector includes a first part located underneath the micro-plate which extends as a second part not positioned underneath the micro-plate. At least the second part has surface texturing in a repeating pattern for coupling a portion of incident radiation on the second part to a guided wave that propagates towards the first part of the reflector positioned underneath micro-plate.

Abstract: This bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared or terahertz wavelengths comprises a substrate and an array of bolometric micro-plates for detecting said radiation that are suspended above the substrate by support arms. It comprises a metallic membrane located above and around each micro-plate and in which openings are formed; said openings in metallic membrane are periodically located in it along at least one predetermined axis with a period equal to or less than ? n , where ? is a wavelength in the wavelength range that is to be detected and n is the average refraction index of the medium that separates the micro-plate from metallic membrane.