Abstract: An apparatus and method for sequentially cleaning and coating articles. The apparatus is in the form of a multi-chamber device, with each chamber being partially defined by valve units which permit passage of articles to be coated therethrough. Each chamber has associated therewith means for drawing a vacuum therein, several chambers include means for leaking a minute quantity of an inert but ionizable gas therein, and at least one chamber further includes at least one electrode, which may be placed in electrical communication with the articles so as to establish, in one of several ways, a direct current bias on the article with respect to another point within the chamber. Coating material to be transferred to the article is placed on one electrode, preferably in the form of a flat plate, in those chambers in which coating is to take place, whereas target material is not present in the cleaning or other non-coating chambers.