Patents by Inventor George F. Cunningham, Jr.

George F. Cunningham, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RF Coupling techniques
    Patent number: 4512841
    Abstract: An improved reactive ion plasma etching apparatus having an improved electrode, for holding the product, such as a semiconductor wafer, to be etched, provided with a plurality of apertures into which different tailored product holders are inserted so as to alter the plasma over each holder and provide more uniform etching of the product in the holder regardless of its position on the electrode.
    Type: Grant
    Filed: April 2, 1984
    Date of Patent: April 23, 1985
    Assignee: International Business Machines Corporation
    Inventors: George F. Cunningham, Jr., John W. Lewis, Robert B. McClure, Daniel J. Poindexter