Patents by Inventor George Howard Robbins

George Howard Robbins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7714305
    Abstract: Apparatus and methods for compensating for the movement of a substrate in a lithographic apparatus during a pulse of radiation include providing a pivotable mirror configured to move a patterned radiation beam incident on the substrate in substantial synchronism with the substrate.
    Type: Grant
    Filed: March 9, 2006
    Date of Patent: May 11, 2010
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, David William Callan, Robert-Han Munnig Schmidt, George Howard Robbins