Patents by Inventor George Lazari

George Lazari has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad conditioner with shaped abrasive patterns and channels
    Patent number: 7066795
    Abstract: A polishing pad conditioner comprises a base and a pad conditioning face on the base. The conditioning face comprises central and peripheral regions. Abrasive spokes having a substantially constant width of abrasive particles, extend from the central to the peripheral region. The spokes are symmetric and radially spaced apart from one another, and may have a variety of shapes. The conditioning face can also have a cutout inlet channel to receive polishing slurry when the conditioning face is rubbed against a polishing pad, a conduit to receive the polishing slurry from the cutout inlet channel, and an outlet on the peripheral edge of the base to discharge the received polishing slurry.
    Type: Grant
    Filed: October 12, 2004
    Date of Patent: June 27, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Venkata R. Balagani, George Lazari, Kenny King-Tai Ngan
  • POLISHING PAD CONDITIONER WITH SHAPED ABRASIVE PATTERNS AND CHANNELS
    Publication number: 20060079160
    Abstract: A polishing pad conditioner comprises a base and a pad conditioning face on the base. The conditioning face comprises central and peripheral regions. Abrasive spokes having a substantially constant width of abrasive particles, extend from the central to the peripheral region. The spokes are symmetric and radially spaced apart from one another, and may have a variety of shapes. The conditioning face can also have a cutout inlet channel to receive polishing slurry when the conditioning face is rubbed against a polishing pad, a conduit to receive the polishing slurry from the cutout inlet channel, and an outlet on the peripheral edge of the base to discharge the received polishing slurry.
    Type: Application
    Filed: October 12, 2004
    Publication date: April 13, 2006
    Inventors: Venkata Balagani, George Lazari, Kenny Ngan