Patents by Inventor George X. Guo
George X. Guo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8500962Abstract: A method for substrate processing includes producing a magnetic field by a magnetron across the full width of a sputtering surface of a target in a first direction. The magnetron can produce two erosion grooves separated by a distance S on the sputtering surface. The method includes moving the magnetron continuously at a first speed by the distance S in a first segment along a linear travel path. The linear travel path is along a second direction perpendicular to the first direction. The method includes continuously sputtering a material off the sputtering surface and depositing the material on the substrate during the first segment, and moving the magnetron by the distance S in a second segment along the linear travel path at a second speed higher than the first speed without sputtering the material off the sputtering surface or sputtering materials off at significant lower rate.Type: GrantFiled: June 15, 2011Date of Patent: August 6, 2013Assignee: Ascentool IncInventors: George X. Guo, Kai-an Wang
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Patent number: 8408858Abstract: A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, first rollers in the process chamber; and second rollers in the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber. At least some of the first rollers and the second rollers are idler rollers.Type: GrantFiled: August 22, 2010Date of Patent: April 2, 2013Assignee: Ascentool International LimitedInventors: George X. Guo, Kai-an Wang
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Publication number: 20130015056Abstract: A vacuum processing system includes a vacuum chamber that can contain a workpiece therein, a deposition source unit that provides a material to be deposited on the workpiece in vacuum, and a cooling module in thermal contact with the deposition source unit. The cooling module includes one or more holding wells that can contain a cooling liquid. The cooling module can cool the deposition source unit by a loss of latent heat during the evaporation of the cooling liquid.Type: ApplicationFiled: July 15, 2011Publication date: January 17, 2013Inventor: George X. Guo
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Publication number: 20120298169Abstract: A multi junction photovoltaic device includes lower pn junction layers comprising silicon and upper pn junction layers formed over the lower pn junction layers. The upper pn junction layers include a CdTe layer, wherein the upper pn junction layers are electrically serially connected to the lower pn junction layers. The upper pn junction layers can convert a first portion of photons into a first electric voltage. The lower pn junction layers can convert a second portion of photons into a second electric voltage lower than the first electric voltage.Type: ApplicationFiled: November 18, 2011Publication date: November 29, 2012Inventors: George X. Guo, Zhengyu Zhang
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Publication number: 20120207916Abstract: A vacuum processing system includes a vacuum chamber in connection with a vacuum pump that can exhaust air or vapor in the vacuum chamber, and a container in the vacuum chamber configured to contain one or more work pieces therein and to receive a heat-exchange liquid that comes into contact with the one or more work pieces to allow heat exchange with the one or more work pieces. The vacuum pump can exhaust at least a portion of the vapor evaporated from the heat-exchange liquid on the work pieces or in the container. A deposition source unit can provide material to be deposited on the one or more work pieces in vacuum. The one or more work pieces can be brought a predetermined temperature by the heat-exchange liquid.Type: ApplicationFiled: June 29, 2011Publication date: August 16, 2012Inventor: George X. Guo
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Patent number: 8236152Abstract: A deposition system includes a chamber, a plurality of targets in a center region in the chamber and a plurality of substrates in the chamber. The targets are sequentially positioned when viewed in a first direction. At least one of the targets includes a sputtering surface facing outward. The substrates are sequentially positioned when viewed in the first direction. At least one of the substrates includes a deposition surface configured to receive material sputtered off the sputtering surface.Type: GrantFiled: November 24, 2006Date of Patent: August 7, 2012Assignee: Ascentool International Ltd.Inventors: George X. Guo, Kai-an Wang
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Publication number: 20120111270Abstract: A plasma-enhanced substrate processing system includes a magnetic-field generation unit that can create a substantially uniform magnetic field along an axial direction in a spatial region, a processing chamber in the spatial region, and a first planar source unit that provides a deposition material. The magnetic field can produce a plasma gas in the processing chamber, which enables the deposition material to be deposited on a substrate.Type: ApplicationFiled: June 14, 2011Publication date: May 10, 2012Inventor: George X. Guo
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Patent number: 8152975Abstract: A target assembly for material deposition includes a first target piece having a first sputtering surface and comprising a first target material that is to be sputtered off the first sputtering surface and to deposit on a substrate. The target assembly also includes a second target piece juxtaposed to the first target piece. The second target piece comprises a second sputtering surface and a second target material that can be sputtered off the second sputtering surface and to deposit on the substrate. The first target piece and the second target piece are configured to be switched in positions and/or orientations after a period of sputtering operations.Type: GrantFiled: March 30, 2007Date of Patent: April 10, 2012Assignee: Ascentool InternationalInventors: George X. Guo, Kai-an Wang
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Publication number: 20120031755Abstract: A deposition system includes a chamber, a plurality of targets in a center region in the chamber and a plurality of substrates in the chamber. The targets are sequentially positioned when viewed in a first direction. At least one of the targets includes a sputtering surface facing outward. The substrates are sequentially positioned when viewed in the first direction. At least one of the substrates includes a deposition surface configured to receive material sputtered off the sputtering surface.Type: ApplicationFiled: October 12, 2011Publication date: February 9, 2012Inventor: George X. Guo
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Patent number: 8092601Abstract: A substrate processing system includes a source unit configured to supply a deposition material to a substrate, a substrate holder configured to hold a substrate to receive the deposition material, a shadow mask comprising a frame that includes two opposing arms; and a crossbar configured to be mounted to the two opposing arms. The frame and the crossbar define a plurality of openings that allow the deposition material supplied by the source unit to be deposited on the substrate. A transport mechanism can produce relative movement between the shadow mask and the substrate.Type: GrantFiled: December 9, 2007Date of Patent: January 10, 2012Assignee: Ascentool, Inc.Inventors: George X. Guo, Kai-an Wang
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Publication number: 20110240461Abstract: A method for substrate processing includes producing a magnetic field by a magnetron across the full width of a sputtering surface of a target in a first direction. The magnetron can produce two erosion grooves separated by a distance S on the sputtering surface. The method includes moving the magnetron continuously at a first speed by the distance S in a first segment along a linear travel path. The linear travel path is along a second direction perpendicular to the first direction. The method includes continuously sputtering a material off the sputtering surface and depositing the material on the substrate during the first segment, and moving the magnetron by the distance S in a second segment along the linear travel path at a second speed higher than the first speed without sputtering the material off the sputtering surface or sputtering materials off at significant lower rate.Type: ApplicationFiled: June 15, 2011Publication date: October 6, 2011Inventors: George X. Guo, Kai-an Wang
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Publication number: 20110230010Abstract: A substrate processing system includes a source unit configured to supply a deposition material to a substrate, a substrate holder configured to hold a substrate to receive the deposition material, a shadow mask comprising a frame that includes two opposing arms; and a crossbar configured to be mounted to the two opposing arms. The frame and the crossbar define a plurality of openings that allow the deposition material supplied by the source unit to be deposited on the substrate. A transport mechanism can produce relative movement between the shadow mask and the substrate.Type: ApplicationFiled: June 2, 2011Publication date: September 22, 2011Inventors: George X. Guo, Kai-an Wang
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Patent number: 7806641Abstract: A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, first rollers in the process chamber; and second rollers in the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber. The first rollers and the second rollers are not rotated by an active transport mechanism.Type: GrantFiled: August 30, 2007Date of Patent: October 5, 2010Assignee: Ascentool, Inc.Inventors: George X. Guo, Kai-an Wang
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Patent number: 6039759Abstract: A prosthetic mechanical valve includes a base portion defining a through blood flow pathway closed by at least a pair of valve leaflets. The valve leaflets are pivotally carried by the base portion and movable in response to dynamic blood fluid pressures between a first position at which the leaflets close blood flow through the pathway and a second open position allowing blood flow in the pathway. A pair of confronting magnets are carried one to each of the pair of valve leaflets and attract one another. The magnetic forces of attraction between the pair of magnets imparts a biasing torque to the valve leaflets which tends to synchronize pivotal movements of the leaflets, cushions their sealing contact, quiets valve operation, and biases the leaflets toward a third partially open position. As a result, under conditions of nearly balanced blood fluid pressures across the pair of valve leaflet they anticipatorily open toward their third position to improve pumping effectiveness.Type: GrantFiled: July 23, 1998Date of Patent: March 21, 2000Assignee: Baxter International Inc.Inventors: Alain Carpentier, George X. Guo, Stefan G. Schreck
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Patent number: 5861030Abstract: A bileaflet mechanical cardiovascular valve having a generally annular valve body and two occluder leaflets mounted within the valve body such that the occluder leaflets will move back and forth between an open configuration wherein blood is permitted to flow through the annular valve body and a closed configuration wherein blood is prevented from flowing in at least one direction through the annular valve body. Slots formed in opposite ends of the occluder leaflets are mounted upon raised mounting members formed on the inner surface of the annular valve body to facilitate the opening and closing movement of the occluder leaflets.Type: GrantFiled: March 21, 1997Date of Patent: January 19, 1999Assignee: Baxter International Inc.Inventors: Richard S. Rhee, George X. Guo, Seik Oh
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Patent number: 5814100Abstract: A prosthetic mechanical valve includes a base portion defining a through blood flow pathway closed by at least a pair of valve leaflets. The valve leaflets are pivotally carried by the base portion and movable in response to dynamic blood fluid pressures between a first position at which the leaflets close blood flow through the pathway and a second open position allowing blood flow in the pathway. A pair of confronting magnets are carried one to each of the pair of valve leaflets and attract one another. The magnetic forces of attraction between the pair of magnets imparts a biasing torque to the valve leaflets which tends to synchronize pivotal movements of the leaflets, cushions their sealing contact, quiets valve operation, and biases the leaflets toward a third partially open position. As a result, under conditions of nearly balanced blood fluid pressures across the pair of valve leaflet they anticipatorily open toward their third position to improve pumping effectiveness.Type: GrantFiled: August 9, 1996Date of Patent: September 29, 1998Assignee: Baxter International Inc.Inventors: Alain Carpentier, George X. Guo, Stefan G. Schreck
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Patent number: 5554186Abstract: A bileaflet mechanical cardiovascular valve comprising an annular valve body having a pair of occluder leaflets pivotally mounted therewithin. The occluder leaflets are pivotally mounted within the valve body by the snap-fitting of ear member which extend from the top and bottom ends of the occluder leaflets into corresponding cropped pivot slots formed within the annular valve body. Each cropped pivot slot comprises a spheroidal depression or recess having a first flat cropped edge and a second flat cropped edge. The ear members of the occluder leaflets are sized and configured relative to the cropped pivot slots to facilitate opening and closing of the occluder leaflets with minimal likelihood of hemolysis or thrombotic complications. Additionally disclosed is a specialized machine tool and method for machining the cropped pivot slots in the annular valve body.Type: GrantFiled: December 22, 1994Date of Patent: September 10, 1996Assignee: Baxter International Inc.Inventors: George X. Guo, Robert Stobie