Patents by Inventor Gerald S. Meder

Gerald S. Meder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6723437
    Abstract: A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.
    Type: Grant
    Filed: February 19, 2002
    Date of Patent: April 20, 2004
    Assignee: Saint-Gobain Ceramics & Plastics, Inc.
    Inventors: Andrew G. Haerle, Gerald S. Meder
  • Patent number: 6565667
    Abstract: A method for cleaning an inorganic surface of a virgin semiconductor processing component by directing a flow of frozen CO2 pellets upon the surface. After cleaning, the component is packaged for transport and installation into a furnace used for processing semiconductor wafers.
    Type: Grant
    Filed: July 2, 2001
    Date of Patent: May 20, 2003
    Assignee: Saint-Gobain Ceramics and Plastics, Inc.
    Inventors: Andrew G. Haerle, Gerald S. Meder
  • Publication number: 20020168867
    Abstract: A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.
    Type: Application
    Filed: February 19, 2002
    Publication date: November 14, 2002
    Inventors: Andrew G. Haerle, Gerald S. Meder
  • Publication number: 20020006766
    Abstract: A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.
    Type: Application
    Filed: July 2, 2001
    Publication date: January 17, 2002
    Inventors: Andrew G. Haerle, Gerald S. Meder
  • Patent number: 6296716
    Abstract: A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelleted CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.
    Type: Grant
    Filed: December 22, 1999
    Date of Patent: October 2, 2001
    Assignee: Saint-Gobain Ceramics and Plastics, Inc.
    Inventors: Andrew G. Haerle, Gerald S. Meder