Patents by Inventor Gerald Schoenecker
Gerald Schoenecker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20150228452Abstract: A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the secondary beam; a detection element for detecting the secondary beam particles, and three deflection elements, wherein at least a first deflector is provided between the beam bender and the focusing lens, at least a second deflector is provided between the focusing lens and the detection element, at least a third deflector is provided between the beam splitter and the detection element.Type: ApplicationFiled: April 17, 2015Publication date: August 13, 2015Inventors: Stefan LANIO, Jürgen FROSIEN, Gerald SCHÖNECKER, Dieter WINKLER
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Patent number: 9048068Abstract: An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.Type: GrantFiled: May 10, 2010Date of Patent: June 2, 2015Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbHInventors: Stefan Lanio, Gerald Schoenecker
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Patent number: 8963083Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.Type: GrantFiled: August 6, 2013Date of Patent: February 24, 2015Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventors: Matthias Firnkes, Stefan Lanio, Gerald Schönecker, Dieter Winkler
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Publication number: 20150021474Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.Type: ApplicationFiled: August 6, 2013Publication date: January 22, 2015Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventors: Matthias FIRNKES, Stefan LANIO, Gerald SCHÖNECKER, Dieter WINKLER
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Patent number: 8723117Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.Type: GrantFiled: July 6, 2012Date of Patent: May 13, 2014Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventors: Stefan Lanio, Gerald Schönecker, Dieter Winkler
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Publication number: 20130270438Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.Type: ApplicationFiled: July 6, 2012Publication date: October 17, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventors: Stefan LANIO, Gerald Schönecker, Dieter Winkler
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Patent number: 8373136Abstract: An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.Type: GrantFiled: October 15, 2009Date of Patent: February 12, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventors: Gerald Schoenecker, Stefan Lanio
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Publication number: 20110272577Abstract: An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.Type: ApplicationFiled: May 10, 2010Publication date: November 10, 2011Applicant: ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik GmbHInventors: Stefan LANIO, Gerald SCHOENECKER
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Publication number: 20110089322Abstract: An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.Type: ApplicationFiled: October 15, 2009Publication date: April 21, 2011Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventors: Gerald SCHOENECKER, Stefan LANIO
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Patent number: 7468517Abstract: The present invention provides a charged particle beam device. The device comprises a first lens generating a crossover a second lens positioned after the crossover and an element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.Type: GrantFiled: September 2, 2004Date of Patent: December 23, 2008Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiternruftechnik mbHInventors: Jürgen Frosien, Ralf Degenhardt, Stefan Lanio, Gerald Schönecker
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Patent number: 7335894Abstract: The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.Type: GrantFiled: November 15, 2005Date of Patent: February 26, 2008Assignee: ICT Integrated Circuit Testing GesselschaftInventors: Juergen Frosien, Stefan Lanio, Gerald Schoenecker, Alan D. Brodie, David A. Crewe
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Publication number: 20060151711Abstract: The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.Type: ApplicationFiled: November 15, 2005Publication date: July 13, 2006Inventors: Juergen Frosien, Stefan Lanio, Gerald Schoenecker, Alan Brodie, Davis Crewe
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Patent number: 4980558Abstract: An electron beam generator or electron gun has a line-shaped cathode with a flattened tip as an electron source, a slotted diaphragm disposed in the plane of the cathode tip, and a double anode having two electrodes also fashioned as slotted diaphragms. The voltage potentials of the three slotted diaphragms, and their respective distances to the cathode, are selected such that a stigmatic virtual electron source at infinity is obtained.Type: GrantFiled: July 13, 1989Date of Patent: December 25, 1990Assignee: Siemens AktiengesellschaftInventors: Harald Rose, Gerald Schoenecker