Patents by Inventor Gerald Volpe

Gerald Volpe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography
    Patent number: 7463402
    Abstract: In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: December 9, 2008
    Assignee: ASML Holding N.V.
    Inventors: Wenceslao A. Cebuhar, Jason D. Hintersteiner, Azat Latypov, Gerald Volpe
  • Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
    Publication number: 20060114546
    Abstract: In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
    Type: Application
    Filed: January 10, 2006
    Publication date: June 1, 2006
    Applicant: ASML Holding N.V.
    Inventors: Wenceslao Cebuhar, Jason Hintersteiner, Azat Latypov, Gerald Volpe
  • Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
    Patent number: 6985280
    Abstract: In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
    Type: Grant
    Filed: November 5, 2004
    Date of Patent: January 10, 2006
    Assignee: ASML Holding N.V.
    Inventors: Wenceslao A. Cebuhar, Jason D. Hintersteiner, Azat Latypov, Gerald Volpe
  • Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
    Publication number: 20050094245
    Abstract: In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
    Type: Application
    Filed: November 5, 2004
    Publication date: May 5, 2005
    Inventors: Wenceslao Cebuhar, Jason Hintersteiner, Azat Latypov, Gerald Volpe
  • Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
    Patent number: 6831768
    Abstract: In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: December 14, 2004
    Assignee: ASML Holding N.V.
    Inventors: Wenceslao A. Cebuhar, Jason D. Hintersteiner, Azat Latypov, Gerald Volpe