Abstract: Device for heating a substrate includes a process chamber having a first and a second sealable opening for a substrate to pass through, a first inlet for receiving a process gas and a first outlet for discharging an off-gas; an evaporator for evaporating the material, which evaporator device is connected to the chamber for supplying the process gas; a first condensation device connected to the chamber for receiving the off-gas and condensing the material in the vapour phase in the off-gas to form a solid phase and a second condensation device for condensing part of the material in vapour phase in the off-gas to form a liquid phase, which second condensation device connects the first condensation device to the discharge duct and a connecting duct between the evaporator device and the second condensation device for transporting material in the liquid phase between the second condensation device and the evaporator.

Abstract: A device for heating a substrate according to a predetermined temperature profile for crystallizing a material on the substrate includes: a housing, at least a process chamber situated inside the housing and provided with a first and second opening for passing through a substrate, an inlet for introducing a process gas which includes the material in vapor phase into the chamber, at least two transport rollers attached to the housing for transporting the substrate into the chamber. The device further includes passage spaces for preventing the escape of process gas from the chamber to a space between the chamber and housing, which are situated near respective ends of the transport rollers in the chamber, the respective passage spaces having a first passage opening on an inner wall of the chamber, a second passage opening on an outer wall of the chamber and a first flange fixed around the transport roller.

Abstract: Device for heating a substrate includes a process chamber having a first and a second sealable opening for a substrate to pass through, a first inlet for receiving a process gas and a first outlet for discharging an off-gas; an evaporator for evaporating the material, which evaporator device is connected to the chamber for supplying the process gas; a first condensation device connected to the chamber for receiving the off-gas and condensing the material in the vapour phase in the off-gas to form a solid phase and a second condensation device for condensing part of the material in vapour phase in the off-gas to form a liquid phase, which second condensation device connects the first condensation device to the discharge duct and a connecting duct between the evaporator device and the second condensation device for transporting material in the liquid phase between the second condensation device and the evaporator.

Abstract: A device for heating a substrate according to a predetermined temperature profile for crystallizing a material on the substrate includes: a housing, at least a process chamber situated inside the housing and provided with a first and second opening for passing through a substrate, an inlet for introducing a process gas which includes the material in vapour phase into the chamber, at least two transport rollers attached to the housing for transporting the substrate into the chamber. The device further includes passage spaces for preventing the escape of process gas from the chamber to a space between the chamber and housing, which are situated near respective ends of the transport rollers in the chamber, the respective passage spaces having a first passage opening on an inner wall of the chamber, a second passage opening on an outer wall of the chamber and a first flange fixed around the transport roller.

Abstract: Methods for heat treating glass sheets (13) are disclosed in which the sheets (13) are held in a vertical orientation in a treatment container (15) during the heat treatment. The container (15) includes a support system for the glass sheets (13) that comprises a bottom support (17), two side supports (19a, 19b), and a top support (21). The sheets (13) are slid into the container (15) without contact between their side edges (23a, 23b) and the side supports (19a, 19b). The top support (21) is then slid onto the tops of the sheets (13) without contacting the sheets' top edges (25). In certain embodiments, flushing air which has been HEPA filtered and pre-heated is passed through the container (15) during the heat treatment. Apparatus for practicing the methods of the invention are also disclosed.

Abstract: Methods for heat treating glass sheets (13) are disclosed in which the sheets (13) are held in a vertical orientation in a treatment container (15) during the heat treatment. The container (15) includes a support system for the glass sheets (13) that comprises a bottom support (17), two side supports (19a, 19b), and a top support (21). The sheets (13) are slid into the container (15) without contact between their side edges (23a, 23b) and the side supports (19a, 19b). The top support (21) is then slid onto the tops of the sheets (13) without contacting the sheets' top edges (25). In certain embodiments, flushing air which has been HEPA filtered and pre-heated is passed through the container (15) during the heat treatment. Apparatus for practicing the methods of the invention are also disclosed.

Abstract: Methods for heat treating glass sheets (13) are disclosed in which the sheets (13) are held in a vertical orientation in a treatment container (15) during the heat treatment. The container (15) includes a support system for the glass sheets (13) that comprises a bottom support (17), two side supports (19a, 19b), and a top support (21). The sheets (13) are slid into the container (15) without contact between their side edges (23a, 23b) and the side supports (19a, 19b). The top support (21) is then slid onto the tops of the sheets (13) without contacting the sheets' top edges (25). In certain embodiments, flushing air which has been HEPA filtered and pre-heated is passed through the container (15) during the heat treatment. Apparatus for practicing the methods of the invention are also disclosed.