Patents by Inventor Gerd Dworschak

Gerd Dworschak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reactive ion etching of alumina/TiC substrates
    Patent number: 6001268
    Abstract: The invention is a method of patterning the air bearing surface of a ceramic slider preferably including alumina and titanium carbide. The method includes the steps of forming an etch pattern by depositing and developing a photoresist on the ceramic slider, and reactive ion etching the slider air bearing surface using an etchant gas of argon, sulfur hexafluoride, and methyltrifluoride flowing at a rate which provides a smooth patterned surface on the slider air bearing surface.
    Type: Grant
    Filed: June 5, 1997
    Date of Patent: December 14, 1999
    Assignee: International Business Machines Corporation
    Inventors: Son Van Nguyen, Diana Perez, Andrew Chiuyan Ting, Cherngye Hwang, Martin Straub, Gerd Dworschak