Patents by Inventor Gerhard K. Strauch

Gerhard K. Strauch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ISOLATION FOR MULTI-SINGLE-WAFER PROCESSING APPARATUS
    Publication number: 20100012036
    Abstract: An MSW processing apparatus includes two or more semi-isolated reaction chambers separated from one another by isolation regions configured with two or more TIG elements, either or both of which may be independently purged. The TIG elements may be configured in a staircase-like fashion and include vertical and horizontal conductance spacings, sized so that, under different operational process temperatures of the MSW processing apparatus, a change in the horizontal conductance spacing is less than a change in the vertical conductance spacing.
    Type: Application
    Filed: July 13, 2009
    Publication date: January 21, 2010
    Inventors: Hugo Silva, Martin Dauelsberg, Johannes Lindner, Thomas E. Seidel, Gerhard K. Strauch