Abstract: A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.

Abstract: A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.

Abstract: The invention is directed to a table for vacuum application which is guided by means of aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.

Abstract: The invention is directed to electrostatic deflection systems for corpuscular beams which can be used particularly in microstructured and nanostructured applications in lithography installations or measuring equipment. According to the proposed object of the invention, the individual electrodes of a deflection system of this kind should permanently have and retain a very exact axially symmetric arrangement relative to one another. In the electrostatic deflection system according to the invention, rod-shaped electrodes are held in an axially symmetric arrangement in an inwardly hollow carrier through which a corpuscular beam can be directed. The carrier is formed of at least two, and at most four, carrier members which are connected to one another.

Abstract: The invention is directed to electrostatic deflection systems for corpuscular beams which can be used particularly in microstructured and nanostructured applications in lithography installations or measuring equipment. According to the proposed object of the invention, the individual electrodes of a deflection system of this kind should permanently have and retain a very exact axially symmetric arrangement relative to one another. In the electrostatic deflection system according to the invention, rod-shaped electrodes are held in an axially symmetric arrangement in an inwardly hollow carrier through which a corpuscular beam can be directed. The carrier is formed of at least two, and at most four, carrier members which are connected to one another.

Abstract: A dual-mode electron beam lithography machine (10) comprises an electron beam column (11) for generating an electron beam (12) for writing a pattern on a surface of a substrate 14) by way of a writing current, the substrate being supported on a stage (13) movable to displace the substrate relative to the beam. The column (10) includes beam deflecting plates (16) for deflecting the beam to scan the substrate surface in accordance with the pattern to be written and beam blanking plates (15) for blanking the beam to interrupt writing. The machine further comprises control means (17 to 20) for changing each of writing current, stage movement, beam deflection and beam blanking between a predetermined first mode optimised for pattern-writing accuracy, thus resolution, and a predetermined second mode different from the first mode and optimised for pattern-writing speed, thus throughput.

Abstract: A dual-mode electron beam lithography machine (10) comprises an electron beam column (11) for generating an electron beam (12) for writing a pattern on a surface of a substrate 14) by way of a writing current, the substrate being supported on a stage (13) movable to displace the substrate relative to the beam. The column (10) includes beam deflecting plates (16) for deflecting the beam to scan the substrate surface in accordance with the pattern to be written and beam blanking plates (15) for blanking the beam to interrupt writing. The machine further comprises control means (17 to 20) for changing each of writing current, stage movement, beam deflection and beam blanking between a predetermined first mode optimised for pattern-writing accuracy, thus resolution, and a predetermined second mode different from the first mode and optimised for pattern-writing speed, thus throughput.

Abstract: Packaging machine and especially intermediate elements installed therein for fixing active elements such as for example robots, transposing apparatuses, conveyor belts and the like to a main frame structure of a packaging machine such as for example a CNC-top loading machine, in which both simple and flexible assembly of the modules is possible and the modules can be displaced both in the longitudinal direction and also transversely with respect to the packaging path and can be fixed at any desired locations, wherein the intermediate elements comprise profile members respectively arranged in pairs in parallel mutually juxtaposed relationship, the intermediate elements are held at a defined spacing by means of clamping plates, the clamping plates have projections which stick up laterally of the profile members, and the clamping plates are clamped by means of a clamping mechanism which extends perpendicularly to the longitudinal axis of the intermediate elements between the profile members.

Abstract: The present invention provides for a device for holding a substrate in an exposure system. In the exposure system, the substrate is positioned on a table movable in the X and Y coordinates of an X, Y plane, and the exposure system provides a metering assembly between a table surface and the substrate to adjust the distance and to align the substrate in relation to an exposure optics, from where a corpuscular radiation is directed right-angled onto a substrate surface, corresponding to the Z coordinate. The device for holding the substrate includes two mounting plates aligned parallel to the X, Y plane, adjusted upon the table in a direction to the exposure optics and with different distances to the table surface, the first mounting plate of which being directly connected to the table.

Abstract: A grouping and buffer apparatus for bringing together piece products in a feed region, for intermediatre storage of said products and for preparing a number of said products for removal in removal groups in a removal region, comprises a feed conveyor for the products, and at least first and second mutually parallel endless conveyors which extend in at least substantially mutually parallel relationship with at least one run. Each endless conveyor has at least one group of entrainment members thereon, for receiving the products from the feed conveyor and for transporting the products, and the endless conveyors are controllable independently of each other. The apparatus receives irregularly supplied products and temporarily stores same, and provides for group-wise discharge thereof.

Abstract: A packaging machine of a modular construction designed in accordance with a respective specific task to be performed has a machine bed comprising first and second spaced-apart rows of hollow bed modules which are connected together in successive relationship in the longitudinal direction. The bed modules are held at a spacing by transverse struts.

Abstract: A device for placing chocolates inserted into paper cups with upright, pleated edges into the bottom portion of candy boxes, with cartridges moved by a conveyor belt and having recesses or the like to accomodate the paper cups; a device for inserting the paper cups into the recesses in the cartridges; a device for inserting the chocolates into the paper cups and a device for transferring the paper cups filled with chocolates to the bottom portion of a candy box, wherein said cartridges have grooves extending from one side to the other side, with bridges disposed therebetween, with lateral indentations disposed facing one another at the locations of said paper cups.

Abstract: A ceramic transport shaft for a furnace includes a ceramic shaft member and a metal end cap into which an end of the shaft member is fitted with an annular gap between the shaft member and the end cap. A sleeve fills the gap. The shaft member, the end cap and the sleeve have such linear thermal coefficients of expansion, and the wall of the sleeve has such a radial thickness, that a change in the radial size of the gap due to thermal expansion of the shaft member and the end cap is at least equalled by a change in the radial thickness of the sleeve wall. The sleeve has one or more axial slots to absorb the circumferential expansion thereof during heating.

Abstract: A gas static bearing unit for carrying rollers which is suitable as a heat-resistant bearing inside a horizontal furnace for glass sheets. The bearing unit consists of a bearing 1 which automatically adapts to the orientation of the section of roller 27 mounted in the bearing 1 and which rests on two pins 8, 9 each having a spherical head 16, 17 as a support surface. The first spherical head 17 is mounted stationarily and oscillatingly, and the second spherical head 16 is mounted on a planar base 23 to allow pivoting and sliding around the stationary pin 9. A system of bores 30, 31, 32, 33 makes it possible to supply the rotating clearance with compressed air.

Abstract: The invention relates to bending of glass plates moving in a horizontal position, under the effect of their own weight, with a device comprising a shaping bed made of rotating shaping elements whose surfaces in contact with the glass plates, as they advance, define increasingly curved generatrices, these shaping elements being carried by a frame that can be inclined by pivoting around a transverse axis located at its upstream end. The frame is mounted on pivoting axes (XX', YY', ZZ') that are adjustable in height. Particular zones of the glass plates can be kept at a constant level during bending, which improves the optical quality of the glass plates thus bent.