Patents by Inventor Gerold Lueft

Gerold Lueft has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for applying thin layers onto a substrate
    Patent number: 5223111
    Abstract: One piece hollow members 6, 7 supported at the wall of the vacuum chamber 1 are provided parallel to the plane of the cathode 12 and in the area between the cathode 12 and the anode 4, 5. These members have axis-parallel conduits 6a, 6b, 6d, 7a, 7b, 7d passed through by both the temperature-regulating medium and the process gas. The hollow members 6, 7 have openings 6e, 6e', . . . , 7e, 7e', . . . which run transversely to the longitudinal axis of the conduits for the process gas to emerge into the vacuum chamber 1.
    Type: Grant
    Filed: May 9, 1990
    Date of Patent: June 29, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventor: Gerold Lueft