Patents by Inventor Gildardo R. Delgado

Gildardo R. Delgado has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Broadband plasma light sources for substrate processing
    Patent number: 8216773
    Abstract: Broadband radiation may be generated by supplying a gas mixture containing hydrogen and/or deuterium and/or helium and/or neon to an enclosure, generating a plasma inside the enclosure with the gas mixture. Broadband radiation generated as a result of the plasma discharge to a substrate may be optically coupled to a substrate located outside the enclosure.
    Type: Grant
    Filed: January 25, 2010
    Date of Patent: July 10, 2012
    Assignee: KLA-Tencor Corporation
    Inventor: Gildardo R. Delgado
  • Broadband plasma light sources with cone-shaped electrode for substrate processing
    Patent number: 7652430
    Abstract: Broadband radiation may be generated by supplying a gas mixture containing hydrogen and/or deuterium and/or helium and/or neon to an enclosure, generating a plasma inside the enclosure with the gas mixture. Broadband radiation generated as a result of the plasma discharge to a substrate may be optically coupled to a substrate located outside the enclosure.
    Type: Grant
    Filed: September 12, 2005
    Date of Patent: January 26, 2010
    Assignee: KLA-Tencor Technologies Corporation
    Inventor: Gildardo R. Delgado