Abstract: In one respect, the invention is an improved valve block design having minimal or no deadlegs that improves the efficiency of a system purge process. In another respect, the invention is a system incorporating said improved valve block design.

Abstract: Described herein are aerosol-free vessels, delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The clogging of valves and piping as some precursors decompose vapor are minimized. This invention prevents mist from forming and thus preventing clogging or wafer contamination from aerosols.

Abstract: In one respect, the invention is an improved valve block design having minimal or no deadlegs that improves the efficiency of a system purge process. In another respect, the invention is a system incorporating said improved valve block design.

Abstract: In one respect, the invention is an improved diptube design for a container for containing and dispensing a liquid chemical, the diptube generating a spring force when compressed that acts to maintain a bottom end of the diptube in contact with a bottom interior surface of the container and a notch located at a bottom edge of the bottom end of the diptube that creates a flow communication between the diptube and the interior volume of the base portion of the container. In another respect, the invention is a method of constructing a container having these limitations.

Abstract: In one respect, the invention is an improved diptube design for a container for containing and dispensing a liquid chemical, the diptube generating a spring force when compressed that acts to maintain a bottom end of the diptube in contact with a bottom interior surface of the container and a notch located at a bottom edge of the bottom end of the diptube that creates a flow communication between the diptube and the interior volume of the base portion of the container. In another respect, the invention is a method of constructing a container having these limitations.

Abstract: A transportable container for high purity, high cost, liquid chemicals capable of maximizing dispensing of the liquid chemical content of the container at deviations from an upright position, comprising; a top wall, a side wall and a bottom wall, the bottom wall having an internal surface contacting liquid chemical with a concave upward contour having a lowest most point axially central to the container, an inlet, an outlet comprising a diptube through which the liquid chemical can be dispensed from said container with an outlet end adjacent the top surface and an inlet terminal end adjacent the lowest most point, a level sensor assembly having an output end adjacent the top surface and a terminal end adjacent the lowest most point; the diptube and the level sensor assembly being more proximate to one another at their terminal ends than their ends adjacent the top surface.

Abstract: A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.

Abstract: A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.

Abstract: A transportable container for high purity, high cost, liquid chemicals capable of maximizing dispensing of the liquid chemical content of the container at deviations from an upright position, comprising; a top wall, a side wall and a bottom wall, the bottom wall having an internal surface contacting liquid chemical with a concave upward contour having a lowest most point axially central to the container, an inlet, an outlet comprising a diptube through which the liquid chemical can be dispensed from said container with an outlet end adjacent the top surface and an inlet terminal end adjacent the lowest most point, a level sensor assembly having an output end adjacent the top surface and a terminal end adjacent the lowest most point; the diptube and the level sensor assembly being more proximate to one another at their terminal ends than their ends adjacent the top surface.