Abstract: A substrate analysis apparatus is provided. The substrate analysis includes: an interlayer conveying module configured to transport a first FOUP; an exchange module which is connected to the interlayer conveying module, and configured to transfer a wafer from the first FOUP to a second FOUP; a pre-processing module configured to form a test wafer piece using the wafer inside the second FOUP; an analysis module configured to analyze the test wafer piece; and a transfer rail configured to transport the second FOUP containing the wafer and a tray containing the test wafer piece. The wafer includes a first identifier indicating information corresponding to the wafer, the test wafer piece includes a second identifier indicating information generated by the pre-processing module which corresponds to the test wafer piece, and the analysis module is configured to analyze the first identifier and the second identifier in connection with each other.

Abstract: The present invention relates to a fusion protein comprising a SARS-CoV-2-derived receptor-binding domain and a nucleocapsid protein, and the use thereof. The fusion protein comprising a coronavirus-derived receptor-binding domain and a nucleocapsid protein is highly applicable to a multivalent vaccine composition having greatly improved in-vivo half-life and remarkably superior efficacy compared to an immunogenic composition comprising only a receptor-binding domain. In particular, the fusion protein can greatly improve the titer of the coronavirus-specific antibody formation and T-cell immune response, and is thus useful for the prevention and treatment of coronaviruses comprising SARS-CoV-2.

Abstract: Provided are an oxidation catalyst for anion exchange membrane water electrolysis exhibiting excellent catalytic activity and electrical conductivity, a uniform particle size distribution and a large surface area, and excellent durability, and a preparation method thereof, an anode for anion exchange membrane water electrolysis and an anion exchange membrane water electrolysis system, each including the oxidation catalyst.

Abstract: The present disclosure provides an oxidization electrode for anion exchange membrane water electrolysis having low cost, high performance, and high stability. Specifically, an embodiment of the present disclosure provides an oxidization electrode for anion exchange membrane water electrolysis, comprising: a nickel metal; and a layered double hydroxide (LDH) with a monolayer structure containing nickel and iron and disposed on one surface or both surfaces of the nickel metal.

Abstract: An embodiment apparatus for complementing a braking force of a vehicle includes a driving unit configured to drive an autonomous drone, a braking complement system connected with the driving unit and configured to complement the braking force, and a controller configured to determine a braking complement condition of the vehicle and to drive the braking complement system based on the braking complement condition. An embodiment braking complement system includes a compressor, wherein the driving unit is configured to apply an electric driving force to the compressor, an air tank in which compressed air discharged from the compressor is stored, and a braking complement unit connected with a discharge end of the air tank.

Abstract: The present invention relates to a gas distribution unit for a fluidized bed reactor system, a fluidized bed reactor system having the gas distribution unit, and a method for preparing granular polysilicon using the fluidized bed reactor system. The gas distribution unit for a fluidized bed reactor system according to the present invention enables gas flow rate control and gas composition control for each zone within the plenum chamber. In addition, a fluidized bed reactor system having the gas distribution unit enables shape control of a fluidized bed (in particular, transition between a bubbling fluidized bed and a spout fluidized bed). The method for preparing granular polysilicon using the fluidized bed reactor system not only simultaneously improves process stability and productivity, but also enables more flexible handling in the event of an abnormal situation.

Abstract: A method for preparing trichlorosilane according to an embodiment of the present invention comprises the steps of: supplying surface-modified metal silicide and metal grade silicon to a reaction unit; supplying silicon tetrachloride and hydrogen to the reaction unit; and supplying a product, which is generated by a reaction of metal grade silicon, silicon tetrachloride, and hydrogen in the presence of metal silicide in the reaction unit, to a separation unit, and separating a trichlorosilane component. In cases where a silicon tetrachloride hydrochlorination reaction is performed using the method for preparing trichlorosilane according to the embodiment of the present invention, the yield of trichlorosilane can be raised.

Abstract: The present invention relates to a purification method and a purification apparatus for off-gas. More specifically, the present invention relates to a purification method and a purification apparatus for off-gas, capable of lowering the concentration of hydrogen chloride and separating high-purity hydrogen from the off-gas, which is discharged after performing a polysilicon deposition process by a chemical vapor deposition reaction.

Abstract: Provided is a method of preparing trichlorosilane, more particularly, a method of preparing trichlorosilane which trichlorosilane can be obtained with an improved yield using a catalyst-supported silicon.

Abstract: The present invention relates to a purification method and a purification apparatus for off-gas. More specifically, the present invention relates to a purification method and a purification apparatus for off-gas, capable of lowering the concentration of hydrogen chloride and separating high-purity hydrogen from the off-gas, which is discharged after performing a polysilicon deposition process by a chemical vapor deposition reaction.

Abstract: The present invention relates to a gas distribution unit for a fluidized bed reactor system, a fluidized bed reactor system having the gas distribution unit, and a method for preparing granular polysilicon using the fluidized bed reactor system. The gas distribution unit for a fluidized bed reactor system according to the present invention enables gas flow rate control and gas composition control for each zone within the plenum chamber. In addition, a fluidized bed reactor system having the gas distribution unit enables shape control of a fluidized bed (in particular, transition between a bubbling fluidized bed and a spout fluidized bed). The method for preparing granular polysilicon using the fluidized bed reactor system not only simultaneously improves process stability and productivity, but also enables more flexible handling in the event of an abnormal situation.

Abstract: Provided is a method of preparing trichlorosilane, more particularly, a method of preparing trichlorosilane which trichlorosilane can be obtained with an improved yield using a catalyst-supported silicon.

Abstract: The present invention relates to a purification method and a purification apparatus for off-gas. More specifically, the present invention relates to a purification method and a purification apparatus for off-gas, capable of lowering the concentration of hydrogen chloride and separating high-purity hydrogen from the off-gas, which is discharged after performing a polysilicon deposition process by a chemical vapor deposition reaction.

Abstract: A method for preparing trichlorosilane according to an embodiment of the present invention comprises the steps of: supplying surface-modified metal silicide and metal grade silicon to a reaction unit; supplying silicon tetrachloride and hydrogen to the reaction unit; and supplying a product, which is generated by a reaction of metal grade silicon, silicon tetrachloride, and hydrogen in the presence of metal silicide in the reaction unit, to a separation unit, and separating a trichlorosilane component. In cases where a silicon tetrachloride hydrochlorination reaction is performed using the method for preparing trichlorosilane according to the embodiment of the present invention, the yield of trichlorosilane can be raised.

Abstract: This disclosure relates to a method for purification of off-gas and a device for the same. More particularly, this disclosure relates to a method for purification of off-gas that removes hydrogen chloride from the off-gas discharged after conducting a polysilicon deposition process by chemical vapor deposition, and can separate hydrogen of high purity, and a device for the same.

Abstract: This invention relates to a method of preparing trichlorosilane, which enables trichlorosilane to be obtained at improved yield using silicon having copper silicide uniformly formed thereon, by uniformly distributing and applying a copper compound on the surface of silicon and then performing heat treatment.

Abstract: The present invention relates to a method for preparing trichlorosilane. According to the method for preparing trichlorosilane of the present invention, trichlorosilane may be obtained with improved yield using silicon where copper silicide is formed.

Abstract: Disclosed is a secondary battery having a element for compensating for and preventing volumetric expansion during charging/discharging of the battery, in order to prevent the electrode assembly from deforming due to rising internal pressure and compensate for and prevent the expansion of the secondary battery case. The secondary battery includes an electrode assembly having positive and negative electrode plates having active materials formed on at least one surface of positive and negative electrode collectors and a separator interposed between the positive and negative electrode plates, a case having a space for containing the electrode assembly and at least one element for compensating for and preventing volumetric expansion, and a cap assembly adapted to be coupled to the case and seal it and provided with a terminal portion in electrical connection to the electrode assembly.

Abstract: The present invention relates to a cathode active material for a lithium secondary battery and a process for preparing the same. In accordance with the present invention, the cathode active material having a high packing density was designed and synthesized and thus provided is a cathode active material for a lithium secondary battery exhibiting structural stability such as improved characteristics for charge/discharge, service life and high-rate and thermal stability, by modifying surface of the electrode active material with amphoteric or basic compounds capable of neutralizing acid produced around the cathode active material.