Abstract: A continuous process is disclosed for the production, with a high yield, of high purity silicon tetrafluoride, starting from an aqueous solution of fluorosilicic acid, which comprises:(a) reacting an aqueous solution of fluorosilicic acid with concentrated sulphuric acid, carried out with a short residence time and preferably under fluido-dynamic conditions of turbulence, inside a reaction zone;(b) separating a gaseous stream containing silicon tetrafluoride from a liquid stream of aqueous sulphuric acid, carried out inside a separation zone, directly connected with the reaction zone;(c) washing said gaseous stream with concentrated and cold sulphuric acid carried out inside a washing zone, for the purpose of separating a gaseous stream of purified silicon tetrafluoride; and, possibly(d) further purifying said gaseous stream of purified silicon tetrafluoride by means of techniques of adsorption on an adsorbent solid material.