Abstract: Systems and methods are described herein for an optical beam-steering device that includes an optical transmitter and/or receiver to transmit and/or receive optical radiation from an optically reflective surface. An array of adjustable plasmonic resonant waveguides is arranged on the surface with inter-element spacings less than an optical operating wavelength. A controller applies a pattern of voltage differentials to the adjustable plasmonic resonant waveguides. The pattern of voltage differentials corresponds to a sub-wavelength reflection phase pattern for reflecting the optical electromagnetic radiation. One embodiment of an adjustable plasmonic resonant waveguide includes first and second metal rails extending from the surface. The metal rails are spaced from one another to form channel therebetween. An electrically-adjustable dielectric is disposed within the channel.

Abstract: The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.

Abstract: A 2D hologram system with a matrix addressing scheme is provided. The system may include a 2D array of sub-wavelength hologram elements integrated with a refractive index tunable core material on a wafer substrate. The system may also include a matrix addressing scheme coupled to the 2D array of sub-wavelength hologram elements and configured to independently control each of the sub-wavelength hologram elements by applying a voltage.

Abstract: Systems and methods are described herein for an optical beam-steering device that includes an optical transmitter and/or receiver to transmit and/or receive optical radiation from an optically reflective surface. An array of adjustable plasmonic resonant waveguides is arranged on the surface with inter-element spacings less than an optical operating wavelength. A controller applies a pattern of voltage differentials to the adjustable plasmonic resonant waveguides. The pattern of voltage differentials corresponds to a sub-wavelength reflection phase pattern for reflecting the optical electromagnetic radiation. One embodiment of an adjustable plasmonic resonant waveguide includes first and second metal rails extending from the surface. The metal rails are spaced from one another to form channel therebetween. An electrically-adjustable dielectric is disposed within the channel.

Abstract: The disclosure provides a method for fabricating a metallic optical metasurface having an array of hologram elements. The method includes forming a first copper layer protected with a conducting or dielectric barrier layer over a backplane structure by a damascene process. The first copper layer comprises a plurality of nano-gaps vertically extending from the backplane structure. The plurality of nano-gaps is filled with a dielectric material. The method also includes removing the dielectric material and a portion of the conducting or dielectric barrier layer to expose the portions in the nano-gaps of the first copper layer. The method may further include depositing a dielectric coating layer over the top portion and exposed side portions of the first copper layer to form a protected first copper layer, and filling the gaps with an electrically-tunable dielectric material that has an electrically-tunable refractive index.

Abstract: Systems and methods are described herein for an optical beam-steering device that includes an optical transmitter and/or receiver to transmit and/or receive optical radiation from an optically reflective surface. An array of adjustable plasmonic resonant waveguides is arranged on the surface with inter-element spacings less than an optical operating wavelength. A controller applies a pattern of voltage differentials to the adjustable plasmonic resonant waveguides. The pattern of voltage differentials corresponds to a sub-wavelength reflection phase pattern for reflecting the optical electromagnetic radiation. One embodiment of an adjustable plasmonic resonant waveguide includes first and second metal rails extending from the surface. The metal rails are spaced from one another to form channel therebetween. An electrically-adjustable dielectric is disposed within the channel.

Abstract: The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.

Abstract: A hologram system may include a hologram chip comprising a wafer substrate having a first plurality of conductive pads on a hologram surface region connected to a second plurality of conductive pads on an interconnect surface region. The hologram chip may also include an array of sub-wavelength hologram elements integrated with a refractive index tunable core material on the hologram region of the wafer substrate. The hologram system may also include a control circuit chip having a third plurality of conductive pads connected to the second plurality of conductive pads on the interconnect region of the wafer substrate. The interconnect region is on the same side of the wafer substrate as the hologram region. The first plurality of conductive pads is directly connected to the array of sub-wavelength hologram elements.

Abstract: An embodiment simultaneously receives light waves emanating from an object and having first frequency components f1.1 and f1.2, and pumped monochromatic coherent light waves having a second frequency f2. The method non-linearly combines the light waves having the first frequency component f1.1 and the pumped monochromatic coherent light waves, and generates coherent light waves having a third frequency component f3.1 that is a sum of the first frequency f1.1 and the second frequency f2. The method non-linearly combines the light waves having the first frequency component f1.2 and the pumped monochromatic coherent light waves, and generates coherent light waves having a third frequency component f3.2 that is a sum of the first frequency f1.2 and the second frequency f2. The method digitizes the generated coherent light waves and outputs an image responsive to the light waves emanating from the object.

Abstract: The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.

Abstract: Embodiments include an apparatus and method. An apparatus includes a metasurface that coherently upconverts light waves having a first frequency f1. A substrate forms a first plasmonic surface. A plasmonic nanoparticle forms a second plasmonic surface. A layer of a second-order nonlinear dielectric material is disposed between the first plasmonic surface and the second plasmonic surface. The metasurface has at least three plasmonic resonant modes including a first plasmonic resonant mode having a first frequency f1, a second plasmonic resonant mode having a second frequency f2, and a third plasmonic resonant mode having a third frequency f3 that is a sum of the first frequency f1 and the second frequency f2. The apparatus includes a second light propagation path from a source of pumped monochromatic coherent light waves having the second frequency f2 to the metasurface. A digital image capture device captures the generated light waves having the frequency f3.

Abstract: Subwavelength conducting particles can be arranged on conducting surfaces to provide arbitrary thermal emissivity spectra. For example, a thermal emissivity spectrum can be tailored to suppress a thermal signature of an object without sacrificing radiative cooling efficiency.

Abstract: Systems and methods are described herein for an optical beam-steering device that includes an optical transmitter and/or receiver to transmit and/or receive optical radiation from an optically reflective surface. An array of adjustable dielectric resonator elements is arranged on the surface with inter-element spacings less than an optical operating wavelength. A controller applies a pattern of voltage differentials to the adjustable dielectric resonator elements. The pattern of voltage differentials corresponds to a sub-wavelength reflection phase pattern for reflecting the optical electromagnetic radiation. One embodiment of a dielectric resonator element includes first and second dielectric members extending from the surface. The dielectric resonator elements are spaced from one another to form a gap or channel therebetween. A voltage-controlled adjustable refractive index material is disposed within the gap.

Abstract: A 2D hologram system with a matrix addressing scheme is provided. The system may include a 2D array of sub-wavelength hologram elements integrated with a refractive index tunable core material on a wafer substrate. The system may also include a matrix addressing scheme coupled to the 2D array of sub-wavelength hologram elements and configured to independently control each of the sub-wavelength hologram elements by applying a voltage.

Abstract: The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.

Abstract: A hologram system may include a hologram chip comprising a wafer substrate having a first plurality of conductive pads on a hologram surface region connected to a second plurality of conductive pads on an interconnect surface region. The hologram chip may also include an array of sub-wavelength hologram elements integrated with a refractive index tunable core material on the hologram region of the wafer substrate. The hologram system may also include a control circuit chip having a third plurality of conductive pads connected to the second plurality of conductive pads on the interconnect region of the wafer substrate. The interconnect region is on the same side of the wafer substrate as the hologram region. The first plurality of conductive pads is directly connected to the array of sub-wavelength hologram elements.

Abstract: Systems and methods are described herein for an optical beam-steering device that includes an optical transmitter and/or receiver to transmit and/or receive optical radiation from an optically reflective surface. An array of adjustable dielectric resonator elements is arranged on the surface with inter-element spacings less than an optical operating wavelength. A controller applies a pattern of voltage differentials to the adjustable dielectric resonator elements. The pattern of voltage differentials corresponds to a sub-wavelength reflection phase pattern for reflecting the optical electromagnetic radiation. One embodiment of a dielectric resonator element includes first and second dielectric members extending from the surface. The dielectric resonator elements are spaced from one another to form a gap or channel therebetween. A voltage-controlled adjustable refractive index material is disposed within the gap.

Abstract: Embodiments include a LIDAR scanning system. A laser is configured to emit pulses of light. A transmit reconfigurable-metasurface is configured to reflect an incident pulse of light as an illumination beam pointing at a field of view. This pointing is responsive to a first holographic beam steering pattern implemented in the transmit reconfigurable-metasurface. A receive reconfigurable-metasurface is configured to reflect a return of the illumination beam to an optical detector. This pointing is responsive to a second holographic beam steering pattern implemented in the receiving reconfigurable-metasurface. An optical detector includes an array of detector pixels. Each detector pixel includes (i) a photodetector configured to detect light in the return of the illumination beam and (ii) a timing circuit configured to determine a time of flight of the detected light. The optical detector is also configured to output a detection signal indicative of the detected light and the time of flight.

Abstract: Embodiments include an apparatus and method. An apparatus includes a metasurface that coherently upconverts light waves having a first frequency f1. A substrate forms a first plasmonic surface. A plasmonic nanoparticle forms a second plasmonic surface. A layer of a second-order nonlinear dielectric material is disposed between the first plasmonic surface and the second plasmonic surface. The metasurface has at least three plasmonic resonant modes including a first plasmonic resonant mode having a first frequency f1, a second plasmonic resonant mode having a second frequency f2, and a third plasmonic resonant mode having a third frequency f3 that is a sum of the first frequency f1 and the second frequency f2. The apparatus includes a second light propagation path from a source of pumped monochromatic coherent light waves having the second frequency f2 to the metasurface. A digital image capture device captures the generated light waves having the frequency f3.

Abstract: An embodiment simultaneously receives light waves emanating from an object and having first frequency components f1.1 and f1.2, and pumped monochromatic coherent light waves having a second frequency f2. The method non-linearly combines the light waves having the first frequency component f1.1 and the pumped monochromatic coherent light waves, and generates coherent light waves having a third frequency component f3.1 that is a sum of the first frequency f1.1 and the second frequency f2. The method non-linearly combines the light waves having the first frequency component f1.2 and the pumped monochromatic coherent light waves, and generates coherent light waves having a third frequency component f3.2 that is a sum of the first frequency f1.2 and the second frequency f2. The method digitizes the generated coherent light waves and outputs an image responsive to the light waves emanating from the object.