Patents by Inventor Glenn E. Storm

Glenn E. Storm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism
    Patent number: 6911283
    Abstract: A method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism are disclosed. A pellicle is coupled to a photomask with a non-distorting mechanism that is located on a pellicle frame opposite a thin film coupled to the pellicle frame. The non-distorting mechanism acts to reduce stress exerted on the photomask by the pellicle.
    Type: Grant
    Filed: February 7, 2002
    Date of Patent: June 28, 2005
    Assignee: DuPont Photomasks, Inc.
    Inventors: Joseph Stephen Gordon, Gregory P. Hughes, Franklin Dean Kalk, Hakki Ufuk Alpay, Glenn E. Storm
  • Method and apparatus for trimming a pellicle film using a laser
    Patent number: 6833222
    Abstract: A method and apparatus for trimming a pellicle film using a laser are disclosed. A laser trimming assembly includes a modified laser-cutting head coupled to a laser. The laser includes a laser beam for trimming a pellicle film that extends beyond a perimeter of a pellicle frame. The modified laser-cutting head includes a nozzle and at least one hose port located on the nozzle. The hose port may receive a vacuum hose for removing particulate matter created during a trimming process.
    Type: Grant
    Filed: March 18, 2002
    Date of Patent: December 21, 2004
    Assignee: DuPont Photomasks, Inc.
    Inventors: John E. Buzerak, Greg A. Fariss, Glenn E. Storm