Abstract: Point-of-use enrichment of gas mixtures for semiconductor structure fabrication, and systems for providing point-of-use enrichment of gas mixtures, are described herein. In an example, a system for fabricating a semiconductor structure includes a process chamber for processing a substrate of a semiconductor structure. A gas supply is coupled to the process chamber. A point-of-use gas enrichment module is coupled to the gas supply. The point-of-use gas enrichment module is configured to concentrate a first gas composition to provide a second gas composition to the gas supply for the process chamber. The second gas composition has a relative amount of a hydride species greater than a relative amount of corresponding hydride species in the first gas composition.

Abstract: Point-of-use enrichment of gas mixtures for semiconductor structure fabrication, and systems for providing point-of-use enrichment of gas mixtures, are described herein. In an example, a system for fabricating a semiconductor structure includes a process chamber for processing a substrate of a semiconductor structure. A gas supply is coupled to the process chamber. A point-of-use gas enrichment module is coupled to the gas supply. The point-of-use gas enrichment module is configured to concentrate a first gas composition to provide a second gas composition to the gas supply for the process chamber. The second gas composition has a relative amount of a hydride species greater than a relative amount of corresponding hydride species in the first gas composition.

Abstract: A method for fabricating a supercapacitor-like electronic battery includes the following steps. A first current collector is formed on a substrate. A first electrode is formed on the first current collector. A first electrode is formed from a first solid state electrolyte and a first conductive material where the first conductive material is irreversible to the mobile ions contained in the first solid state electrolyte and the first conductive material exceeds the percolation limit. An electrolyte is formed on the first electrode. A second electrode is formed on the electrolyte. The second electrode is formed from a second solid state electrolyte and a second conductive material where the second conductive material is irreversible to the mobile ions contained in the second solid state electrolyte and the second conductive material exceeds the percolation limit. A second current collector is formed on the second electrode.

Abstract: The present invention provides an electrochemical cell comprising an anodic current collector in contact with an anode. A cathodic current collector is in contact with a cathode. A solid electrolyte thin-film separates the anode and the cathode.

Abstract: The present invention provides a power system for a vehicle. The power system comprising a supercapacitor-like electronic battery that is connected to a battery charger. The battery charger provides energy to the supercapacitor-like electronic battery. A heater is operatively connected to the supercapacitor-like electronic battery to provide energy to heat the supercapacitor-like electronic battery thereby lowering the internal impedance of the supercapacitor-like electronic battery. A charging apparatus is operatively connected to the battery charger. A motor is operatively connected to the vehicle and the supercapacitor-like electronic battery. A feedback loop controller is operatively connected to the heater, the supercapacitor-like electronic battery and the motor.

Abstract: A method for fabricating a supercapacitor-like electronic battery includes forming a first current collectors on a substrate. A first electrode is formed on the first current collector. A first electrode is formed from a first solid state electrolyte and a first conductive material where the first conductive material is irreversible to the mobile ions contained in the first solid state electrolyte and the first conductive material exceeds the percolation limit. An electrolyte is formed on the first electrode. A second electrode is formed on the electrolyte. The second electrode is formed from a second solid state electrolyte and a second conductive material where the second conductive material is irreversible to the mobile ions contained in the second solid state electrolyte and the second conductive material exceeds the percolation limit. A second current collector is formed on the second electrode.

Abstract: The invention relates to a method for manufacturing a high performance multi layer ceramic capacitor, comprising the steps of: a) providing a substrate having a first edge and a second edge arranged opposite to the first edge, b) depositing a bottom electrode layer onto the substrate using a thick-film and/or thin-film deposition method such that the electrode layer extends all the way from the first edge towards the second edge of the substrate such that a trench free of the bottom electrode layer is provided adjacent in between the deposited bottom electrode layer and the second edge of the substrate, d) depositing a high-k dielectric ceramic layer onto the electrode layer using a thick-film and/or thin-film deposition method such that the high-k dielectric ceramic layer extends all the way to the first edge and to the second edge of the substrate, f) depositing a low-k dielectric layer comprising silicon nitride, silicon dioxide and/or aluminum oxide onto the high-k dielectric ceramic layer using a thin-fi

Abstract: The present invention provides an improved supercapacitor-like electronic battery comprising a conventional electrochemical capacitor structure. A first nanocomposite electrode and a second electrode and an electrolyte are positioned within the conventional electrochemical capacitor structure. The electrolyte separates the nanocomposite electrode and the second electrode. The first nanocomposite electrode has first conductive core-shell nanoparticles in a first electrolyte matrix. A first current collector is in communication with the nanocomposite electrode and a second current collector is in communication with the second electrode. Also provided is an electrostatic capacitor-like electronic battery comprising a high dielectric-strength matrix separating a first electrode from a second electrode and, dispersed in said high-dielectric strength matrix, a plurality of core-shell nanoparticles, each of said core-shell nanoparticles having a conductive core and an insulating shell.

Abstract: A supercapacitor-like electronic battery exhibits a conventional electrochemical capacitor structure with a first nanocomposite electrode positioned within said conventional electrochemical capacitor structure. Said nanocomposite electrode shows nano-scale conductive particles dispersed in a electrolyte matrix, said nano-scale conductive particles being coated with a designed and functionalized organic or organometallic compound. A second nanocomposite electrode is positioned within said conventional electrochemical capacitor structure with similar properties. An electrolyte within said conventional electrochemical capacitor structure separates said first from said second nanocomposite electrode. Two current collectors in communication with said first and second nanocomposite electrode complete the electric scheme.

Abstract: The present invention provides an electrochemical cell comprising an anodic current collector in contact with an anode. A cathodic current collector is in contact with a cathode. A solid electrolyte thin-film separates the anode and the cathode.

Abstract: The present invention provides a method for fabricating a supercapacitor-like electronic battery. The steps for fabricating a supercapacitor-like electronic battery are as follows. A first current collector is formed on a substrate. A first electrode is formed on the first current collector. A first electrode is formed from a first solid state electrolyte and a first conductive material where the first conductive material is irreversible to the mobile ions contained in the first solid state electrolyte and the first conductive material exceeds the percolation limit. An electrolyte is formed on the first electrode. A second electrode is formed on the electrolyte. The second electrode is formed from a second solid state electrolyte and a second conductive material where the second conductive material is irreversible to the mobile ions contained in the second solid state electrolyte and the second conductive material exceeds the percolation limit. A second current collector is formed on the second electrode.

Abstract: The present invention provides a power system for a vehicle The power system comprising a supercapacitor-like electronic battery that is connected to a battery charger. The battery charger provides energy to the supercapacitor-like electronic battery. A heater is operatively connected to the supercapacitor-like electronic battery to provide energy to heat the supercapacitor-like electronic battery thereby lowering the internal impedance of the supercapacitor-like electronic battery. A charging apparatus is operatively connected to the battery charger. A motor is operatively connected to the vehicle and the supercapacitor-like electronic battery. A feedback loop controller is operatively connected to the heater, the supercapacitor-like electronic battery and the motor.

Abstract: A plasma processing system is provided with a cylindrical target, open at both ends, and with a magnet array that forms a hollow cathode magnetron (HCM). At one of the open ends is placed an inductively coupled RF energy source. A dielectric window at one end of the cylindrical target forms a seal between atmosphere and the processing system. A deposition baffle shield permits the coupling of RF energy from the coil into the chamber. The open end of the cylindrical target opposite the RF source faces the processing space. Magnetron magnets produce a magnetic trapping field having a null which acts as a mirror and separates a plasma-source from the processing space.

Abstract: A processing system for processing a substrate with a plasma is provided with a cylindrical target, open at both ends, and with a magnet array of the type disclosed in U.S. Pat. No. 5,482,611, which forms a hollow cathode magnetron (HCM). At one of the open ends of the cylindrical target is placed an inductively coupled RF energy source, as described in U.S. Pat. Nos. 6,080,287 and 6,287,435. A dielectric window at one end of the cylindrical target acts to form a seal between atmosphere and the processing system, and is protected from deposition by a deposition baffle shield located inside of the vacuum space and which is designed to permit the coupling of RF energy therethrough from the coil into the chamber. The open end of the cylindrical target that is opposite the RF source faces the processing space within the vacuum chamber.

Abstract: A rotating anode X-ray target has a matrix structure such as a carbon-carbon matrix and a high Z material imbedded inside this matrix structure. The high Z material may be a refractory metal with atomic number at least 72, its alloy or carbide and may be imbedded in the matrix either as discrete particles or as a non-discrete layer. Such a target can be made by any of a number of known methods such as chemical vapor deposition and chemical vapor infiltration. Without a TZM layer or a braze required for holding together an x-ray-producing surface layer and a carbon heat storage material, the target can be made lighter and can be operated at higher temperatures.