Abstract: Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

Abstract: Imaged-guided therapy for minimally invasive surgeries and interventions is provided. An image-guided device includes an elongate tubular member, such as a catheter, an annular array of capacitive micromachined ultrasound transducers (cMUTs) for real-time three-dimensional forward-looking acoustic imaging, and a therapeutic tool. The therapeutic tool is positioned inside an inner lumen of the elongate tubular member and can be a device for tissue ablation, such as a high intensity focused ultrasound (HIFU) device or a laser. The HIFU device is operable at high frequencies to have a sufficiently small focus spot, thus a high focal intensity. The imaging annular array is also operable at high frequencies for good acoustic imaging resolution. The high resolution forward-looking imaging array, in combination with the high frequency HIFU transducer, provides a single image-guided therapy device for precise tissue ablation and real-time imaging feedback.

Abstract: A mechanical resonator capable of providing an intrinsically high mechanical quality factor in immersion is provided. The resonator includes a membrane attached at its perimeter to a frame, such that a front side of the membrane is in contact with the liquid, and the back side of the membrane is not in contact with the liquid or the frame. The membrane can act as a mechanical resonator. The quality factor of this resonator is enhanced by providing a pressure release boundary region on the frame in proximity to the membrane and in contact with the liquid. The pressure release boundary region provides a soft boundary condition, in the sense that a mechanical impedance on the solid side of the solid-liquid interface is less than the liquid mechanical impedance. Providing such a soft boundary condition reduces the mechanical energy loss due to excitation of waves in the liquid, thereby improving resonator quality factor. Such high-Q resonators are particularly useful for sensor applications.

Abstract: There is described a method and apparatus for measuring temperature of a fluid in a microchannel of the type having spaced walls. An ultrasonic transducer transmits ultrasonic waves transmitted from one wall to the opposite wall. A processor determines the time-of-flight of the ultrasonic waves from the one wall and reflected to the opposite wall to the one wall. The processor converts the time-of-flight to velocity by dividing the distance between walls by the time-of-flight. The processor converts velocity to temperature from the relationship of velocity to temperature in the fluid.

Abstract: An optical displacement sensor is provided for optically measuring the static and dynamic displacement of one or more reflectors that can be integrated in electronics and optics applications. The sensor includes an optically transparent substrate and a reflective grating deposited on the substrate. A light source provides optical illumination on the reflector through the substrate and the reflective grating. The reflector is positioned over the substrate and over the reflective grating. Furthermore, one or more photo-detectors are included to monitor reflected and diffracted light from the reflector and the reflective grating. The position of the reflector can be adjusted by applying at least one DC voltage. An AC signal could be added to at least one DC bias voltage for calibration of the sensor. The present invention also includes an array of reflectors as well as a transmission grating to deflect the optical illumination to the array of reflectors.

Abstract: There is described a method and apparatus for measuring temperature of a fluid in a microchannel of the type having spaced walls. An ultrasonic transducer transmits ultrasonic waves transmitted from one wall to the opposite wall. A processor determines the time-of-flight of the ultrasonic waves from the one wall and reflected to the opposite wall to the one wall. The processor converts the time-of-flight to velocity by dividing the distance between walls by the time-of-flight. The processor converts velocity to temperature from the relationship of velocity to temperature in the fluid.

Abstract: An optical displacement sensor is provided for optically measuring the static and dynamic displacement of one or more reflectors that can be integrated in electronics and optics applications. The sensor includes an optically transparent substrate and a reflective grating deposited on the substrate. A light source provides optical illumination on the reflector through the substrate and the reflective grating. The reflector is positioned over the substrate and over the reflective grating. Furthermore, one or more photo-detectors are included to monitor reflected and diffracted light from the reflector and the reflective grating. The position of the reflector can be adjusted by applying at least one DC voltage. An AC signal could be added to at least one DC bias voltage for calibration of the sensor. The present invention also includes an array of reflectors as well as a transmission grating to deflect the optical illumination to the array of reflectors.