Patents by Inventor Gordana Neskovic

Gordana Neskovic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Haze and defect distribution and aperture configuration in surface metrology inspectors
    Patent number: 10088345
    Abstract: The present disclosure is directed to a method for designing an aperture in a mask for inspecting a wafer. The method includes the steps of scanning a collection plane of the wafer at a plurality of points and collecting data for at least a part of the wafer. The method also includes the step of mapping the data. A further step of the method includes configuring the aperture based on the mapped data.
    Type: Grant
    Filed: December 4, 2012
    Date of Patent: October 2, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Chuanyong Huang, Raymond Chu, Gordana Neskovic, Dieter Wilk, Christian Wolters, Tim Mahatdejkul