Patents by Inventor Gordon E. Dogunke

Gordon E. Dogunke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fused quartz member for use in semiconductor manufacture
    Patent number: 5308446
    Abstract: A composite fused quartz material is disclosed for processing semiconductor grade silicon material in an improved manner. The modified vitreous material includes a disperse phase of fine size silicon metal particles which are distributed in preselected regions of the fused quartz matrix as a means of exercising temperature control in the various semiconductor processing operations using these fused quartz parts. Such utilization of the modified vitreous material in single crystal silicon rod growth and production of semiconductor grade silicon by diffusion doping is described. A method to produce the modified vitreous material is also disclosed.
    Type: Grant
    Filed: June 7, 1990
    Date of Patent: May 3, 1994
    Inventors: Peter P. Bihuniak, Gordon E. Dogunke, Robert D. Shelley
  • Fused quartz member for use in semiconductor manufacture
    Patent number: 4911896
    Abstract: A composite fused quartz material is disclosed for processing semiconductor grade silicon material in an improved manner. The modified vitreous material includes a disperse phase of fine size silicon metal particles which are distributed in preselected regions of the fused quartz matrix as a means of exercising temperature control in the various semiconductor processing operations using these fused quartz parts. Such utilization of the modified vitreous material in single crystal silicon rod growth and production of semiconductor grade silicon by diffusion doping is described. A method to produce the modified vitreous material is also disclosed.
    Type: Grant
    Filed: July 24, 1986
    Date of Patent: March 27, 1990
    Assignee: General Electric Company
    Inventors: Peter P. Bihuniak, Gordon E. Dogunke, Robert D. Shelley