Patents by Inventor Gordon Rouse
Gordon Rouse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20210158223Abstract: Context attributes for optical imaging of a patterned layer of a semiconductor die are calculated. Calculating the context attributes includes calculating convolutions of a pattern of the patterned layer with respective kernels of a plurality of kernels, wherein the plurality of kernels is orthogonal. Defects on the semiconductor die are found in accordance with the context attributes.Type: ApplicationFiled: November 13, 2020Publication date: May 27, 2021Inventors: Abdurrahman Sezginer, Gordon Rouse, Manikandan Mariyappan
-
Patent number: 10832396Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.Type: GrantFiled: March 25, 2019Date of Patent: November 10, 2020Assignee: KLA-Tencor Corp.Inventors: Brian Duffy, Martin Plihal, Santosh Bhattacharyya, Gordon Rouse, Chris Maher, Erfan Soltanmohammadi
-
Publication number: 20200126212Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.Type: ApplicationFiled: March 25, 2019Publication date: April 23, 2020Inventors: Brian Duffy, Martin Plihal, Santosh Bhattacharyya, Gordon Rouse, Chris Maher, Erfan Soltanmohammadi
-
Patent number: 10387601Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.Type: GrantFiled: November 22, 2016Date of Patent: August 20, 2019Assignee: KLA-Tencor CorporationInventors: Thirupurasundari Jayaraman, Srikanth Kandukuri, Gordon Rouse, Anil Raman, Kenong Wu, Praveen Gunasekaran, Aravindh Balaji, Ankit Jain
-
Publication number: 20170154147Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.Type: ApplicationFiled: November 22, 2016Publication date: June 1, 2017Inventors: Thirupurasundari Jayaraman, Srikanth Kandukuri, Gordon Rouse, Anil Raman, Kenong Wu, Praveen Gunasekaran, Aravindh Balaji
-
Patent number: 8139843Abstract: Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.Type: GrantFiled: May 25, 2011Date of Patent: March 20, 2012Assignee: KLA-Tencor Technologies Corp.Inventors: Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse
-
Publication number: 20110286656Abstract: Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least to similar. The method further includes storing results of the binning step in a storage medium.Type: ApplicationFiled: May 25, 2011Publication date: November 24, 2011Applicant: KLA-TENCOR TECHNOLOGIES CORPORATIONInventors: Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse
-
Patent number: 8041103Abstract: Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.Type: GrantFiled: June 7, 2007Date of Patent: October 18, 2011Assignee: KLA-Tencor Technologies Corp.Inventors: Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse, Eugene Shifrin
-
Publication number: 20100119144Abstract: Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.Type: ApplicationFiled: January 22, 2010Publication date: May 13, 2010Applicant: KLA-TENCOR TECHNOLOGIES CORPORATIONInventors: Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse
-
Patent number: 7676077Abstract: Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for determining a position of inspection data in design data space includes aligning data acquired by an inspection system for alignment sites on a wafer with data for predetermined alignment sites. The method also includes determining positions of the alignment sites on the wafer in design data space based on positions of the predetermined alignment sites in the design data space. In addition, the method includes determining a position of inspection data acquired for the wafer by the inspection system in the design data space based on the positions of the alignment sites on the wafer in the design data space. In one embodiment, the position of the inspection data is determined with sub-pixel accuracy.Type: GrantFiled: November 20, 2006Date of Patent: March 9, 2010Assignee: KLA-Tencor Technologies Corp.Inventors: Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse
-
Publication number: 20070230770Abstract: Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.Type: ApplicationFiled: June 7, 2007Publication date: October 4, 2007Inventors: Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse, Eugene Shifrin
-
Publication number: 20070156379Abstract: Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for determining a position of inspection data in design data space includes aligning data acquired by an inspection system for alignment sites on a wafer with data for predetermined alignment sites. The method also includes determining positions of the alignment sites on the wafer in design data space based on positions of the predetermined alignment sites in the design data space. In addition, the method includes determining a position of inspection data acquired for the wafer by the inspection system in the design data space based on the positions of the alignment sites on the wafer in the design data space. In one embodiment, the position of the inspection data is determined with sub-pixel accuracy.Type: ApplicationFiled: November 20, 2006Publication date: July 5, 2007Inventors: Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse
-
Publication number: 20060027702Abstract: An air data system and method for a rotary aircraft is described. The air data system includes a plurality of flush ports connected via tubing to a plurality of air flow sensors that can measure air flow speeds as low as approximately 0.02 knots. The flush ports are arranged around a main rotor shaft and below a rotor hub of the rotary aircraft to help reduce the impact of rotor downwash. The flush ports and tubing permit air to flow into the air flow sensors, which allows the plurality of air flow sensors to measure speed and direction of cross-wind components of air flow surrounding the rotary aircraft.Type: ApplicationFiled: July 13, 2004Publication date: February 9, 2006Applicant: Honeywell International Inc.Inventors: Gordon Rouse, Michael Elgersma, Steven Thomas