Patents by Inventor Govindarajasekhar Singu

Govindarajasekhar Singu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210210373
    Abstract: A reactor system may comprise a reaction chamber enclosed by a chamber sidewall, and a susceptor disposed in the reaction chamber between a reaction space and a lower chamber space comprised in the reaction chamber. The susceptor may comprise a pin hole disposed through the susceptor such that the pin hole is in fluid communication with the reaction space and the lower chamber space, and such that the reaction space is in fluid communication with the lower chamber space. A lift pin may be disposed in the pin hole. The lift pin may comprise a pin body comprising a pin channel, defined by a pin channel surface, disposed in the pin body such that the reaction space is in fluid communication with the lower chamber space when the lift pin is disposed in the pin hole.
    Type: Application
    Filed: January 4, 2021
    Publication date: July 8, 2021
    Inventors: Govindarajasekhar Singu, Dinkar Nandwana, Todd Robert Dunn, Shankar Swaminathan, Bhushan Zope, Carl Louis White
  • Patent number: D990534
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: June 27, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Shreyans Kedia, Daniel Maurice, Govindarajasekhar Singu, Dinkar Nandwana, Frank Wing-Fung Cheng