Patents by Inventor Graham J. Siddell

Graham J. Siddell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated metrology for microlithographic objective reducing lens
    Patent number: 4790642
    Abstract: Metrology for a microlithographic objective reducing lens 10 is integrated into a metrology block 20 secured to a lower region of the barrel 15 for lens 10. Block 20 has a central opening 27 around a lowermost element 11 of lens 10; and block 20 mounts distance detectors 28 around central opening 27, a pair of microscope objectives 30 and 31, and a pair of X and Y mirrors 40 and 41.
    Type: Grant
    Filed: December 1, 1986
    Date of Patent: December 13, 1988
    Assignee: GCA Corporation/Tropel Division
    Inventors: John H. Bruning, Graham J. Siddell