Patents by Inventor Grayson FORD

Grayson FORD has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
    Publication number: 20240038504
    Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.
    Type: Application
    Filed: October 5, 2023
    Publication date: February 1, 2024
    Inventors: Alejandro SANCHEZ, Grayson Ford, Darrell Ehrlich, Aravind Alwan, Kevin Leung, Anthony Contreras, Zhumin Han, Raphael Casaes, Joanna Wu
  • Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
    Patent number: 11798789
    Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: October 24, 2023
    Assignee: Lam Research Corporation
    Inventors: Alejandro Sanchez, Grayson Ford, Darrell Ehrlich, Aravind Alwan, Kevin Leung, Anthony Contreras, Zhumin Han, Raphael Casaes, Joanna Wu
  • PLASMA PROCESSING CHAMBER
    Publication number: 20220002863
    Abstract: A component for use as part of a plasma processing chamber for processing a wafer is provided. The component comprises a component body of silicon carbide doped with at least one of tungsten, tantalum, or boron.
    Type: Application
    Filed: September 27, 2019
    Publication date: January 6, 2022
    Inventors: Lin XU, Thomas R. STEVENSON, Grayson FORD, Satish SRINIVASAN
  • REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
    Publication number: 20200395195
    Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.
    Type: Application
    Filed: September 10, 2018
    Publication date: December 17, 2020
    Inventors: Alejandro SANCHEZ, Grayson FORD, Darrell EHRLICH, Aravind ALWAN, Kevin LEUNG, Anthony CONTRERAS, Zhumin HAN, Raphael CASAES, Joanna WU