Patents by Inventor Greg Tomasch

Greg Tomasch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for Confinement of Foam Delivered by a Proximity Head
    Publication number: 20140251382
    Abstract: A method suctions liquid from an upper surface of a substrate as the substrate is transported by a carrier under a head in a chamber. This operation is performed by the first section of the head. The method causes a first film of cleaning foam to flow onto the upper surface of the substrate as the substrate proceeds under the head. This operation is performed by a second section which is contiguous to the first section in the head. The method causes a second film of rinsing fluid to flow onto the upper surface of the substrate as the substrate is carried under the head. This rinsing operation is performed by a third section which is contiguous to the second section in the head and which is defined partially around the second section and up to the first section.
    Type: Application
    Filed: May 22, 2014
    Publication date: September 11, 2014
    Applicant: Lam Research Corporation
    Inventors: Arnold Kholodenko, Cheng-Yu Lin, Leon Ginzburg, Mark Mandelboym, Greg Tomasch, Anwar Husain