Abstract: A bubbler for use in vapor generation systems that minimizes splashing and the formation of aerosol droplets of liquid, which are carried out of the bubbler in the vapor stream and result in erratic mass transfer of the process chemical liquid. A closed stainless steel vessel contains a carrier gas distribution plenum that distributes the carrier gas to a plurality of small diameter generator tubes, which are submerged into the process chemical liquid. The length, inside diameter and number of the generator tubes are designed to inject a high velocity, small diameter stream of carrier gas into the liquid such that a long small diameter cylinder of carrier gas is created in the process chemical liquid. The surface tension of the liquid-gas interface causes the cylinder of gas to be pinched off at intervals along the length of the cylinder to produce a plurality of small bubbles the diameter of which is largely independent of the carrier gas flow rate.

Abstract: A bubbler for use in vapor generation systems that minimizes splashing and the formation of aerosol droplets of liquid, which are carried out of the bubbler in the vapor stream and result in erratic mass transfer of the process chemical. A closed stainless steel vessel contains a carrier gas distribution plenum that distributes the carrier gas to a plurality of small diameter generator tubes, which are submerged into the process chemical. The length, inside diameter and number of the generator tubes are designed to inject a high velocity, small diameter stream of carrier gas into the liquid such that a long small diameter cylinder of carrier gas is created in the liquid. The surface tension of the liquid-gas interface causes the cylinder of gas to be pinched off at intervals along the length of the cylinder to produce a plurality of small bubbles the diameter of which is largely independent of the carrier gas flow rate.