Patents by Inventor Gregory L. Wojcik
Gregory L. Wojcik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8369658Abstract: A method involving: providing an optical waveguide made of a semiconductor material and having a region that is doped by a deep level impurity which creates deep level states in a bandgap in the semiconductor material, the deep level states characterized by an occupancy; passing an optical signal through the optical waveguide and between the region doped by the deep level impurity; and modulating the occupancy of the deep level states to thereby modulate the optical signal.Type: GrantFiled: July 20, 2010Date of Patent: February 5, 2013Inventors: Andrew P. Knights, Gregory L. Wojcik, Andreas Goebel, Dylan F. Logan, Paul E. Jessop
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Patent number: 8023782Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.Type: GrantFiled: March 13, 2009Date of Patent: September 20, 2011Assignee: Applied Materials, Inc.Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik
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Patent number: 7985689Abstract: Methods of forming a 3D structure in a substrate are disclosed. A layer of resist is deposited on the substrate. The layer of resist is patterned to define an edge at a predetermined location. The resist is reflowed to form a tapered region extending from the etch. Both the reflowed resist and the substrate are concurrently etched to transfer the tapered profile of the reflowed resist into the underlying substrate to form an angled surface. The etching is discontinued before all of the resist is consumed by the etching.Type: GrantFiled: June 14, 2007Date of Patent: July 26, 2011Assignee: Applied Matrials, Inc.Inventors: Eric Perozziello, Thomas Joseph Kropewnicki, Gregory L. Wojcik, Andreas Goebel, Claes Bjorkman
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Publication number: 20110091146Abstract: A method involving: providing an optical waveguide made of a semiconductor material and having a region that is doped by a deep level impurity which creates deep level states in a bandgap in the semiconductor material, the deep level states characterized by an occupancy; passing an optical signal through the optical waveguide and between the region doped by the deep level impurity; and modulating the occupancy of the deep level states to thereby modulate the optical signal.Type: ApplicationFiled: July 20, 2010Publication date: April 21, 2011Inventors: Andrew P. Knights, Gregory L. Wojcik, Andreas Goebel, Dylan F. Logan, Paul E. Jessop
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Patent number: 7869672Abstract: An optical assembly is formed with a silicon substrate having a first surface and a second surface confronting the first surface. A reflective coating is formed over the first surface. Multiple diffraction gratings are formed integrally within the second surface of the silicon substrate. An optical absorber is formed over the second surface between the diffraction gratings.Type: GrantFiled: June 29, 2007Date of Patent: January 11, 2011Assignee: Applied Materials, Inc.Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik
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Patent number: 7760980Abstract: A method of fabricating on a substrate an optical detector in an optical waveguide, the method involving: forming at least one layer on a surface of the substrate, said at least one layer comprising SiGe; implanting an impurity into the at least one layer over a first area to form a detector region for the optical detector; etching into the at least one layer in a first region and a second region to form a ridge between the first and second regions, said ridge defining the optical detector and the optical waveguide; filling the first and second regions with a dielectric material having a lower refractive index than SiGe; and after filling the first and second regions with the dielectric material, removing surface material to form a planarized upper surface.Type: GrantFiled: August 31, 2006Date of Patent: July 20, 2010Assignee: Applied Materials, Inc.Inventors: Lawrence C. West, Gregory L. Wojcik, Francisco A. Leon, Yonah Cho, Andreas Goebel
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Patent number: 7680376Abstract: Methods are disclosed of fabricating an optical assembly. An active optical element is disposed near or on a first surface of a slab of optical material. A passive optical element is formed on a second surface of the slab, with the second surface being substantially parallel to the first surface. An optical axis of the passive optical element is aligned with an optical path between the passive optical element and an active region of the active optical element using a lithographic alignment process.Type: GrantFiled: June 29, 2007Date of Patent: March 16, 2010Assignee: Applied Materials, Inc.Inventors: Andreas Goebel, Gregory L. Wojcik, Lawrence C. West
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Publication number: 20090269878Abstract: A method of fabricating a detector that involves: forming a trench in a substrate, the substrate having an upper surface; forming a first doped semiconductor layer on the substrate and in the trench; forming a second semiconductor layer on the first doped semiconductor layer and extending into the trench, the second semiconductor layer having a conductivity that is less than the conductivity of the first doped semiconductor layer; forming a third doped semiconductor layer on the second semiconductor layer and extending into the trench; removing portions of the first, second and third layers that are above a plane defined by the surface of the substrate to produce an upper, substantially planar surface and expose an upper end of the first doped semiconductor layer in the trench; forming a first electrical contact to the first semiconductor doped layer; and forming a second electrical contact to the third semiconductor doped layer.Type: ApplicationFiled: April 8, 2009Publication date: October 29, 2009Applicant: Applied Materials, Inc.Inventors: Francisco A. Leon, Lawrence C. West, Yuichi Wada, Gregory L. Wojcik, Stephen Moffatt
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Publication number: 20090252495Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.Type: ApplicationFiled: March 13, 2009Publication date: October 8, 2009Applicant: Applied Materials, Inc.Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik
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Patent number: 7505647Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.Type: GrantFiled: June 29, 2007Date of Patent: March 17, 2009Assignee: Applied Amterials, Inc.Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik
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Publication number: 20080124084Abstract: An optical assembly is formed with a silicon substrate having a first surface and a second surface confronting the first surface. A reflective coating is formed over the first surface. Multiple diffraction gratings are formed integrally within the second surface of the silicon substrate. An optical absorber is formed over the second surface between the diffraction gratings.Type: ApplicationFiled: June 29, 2007Publication date: May 29, 2008Applicant: Applied Materials, Inc.Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik
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Patent number: 7298941Abstract: An optoelectronic circuit including: an IC chip made up of a substrate in which an optical waveguide and a mirror have been fabricated, the substrate having a first lens formed thereon, wherein the mirror is aligned with the optical waveguide and the first lens is aligned with the mirror to form an optical path connecting the first lens, the mirror, and the optical waveguide; and an optical coupler including a second lens, the optical coupler affixed to the substrate and positioned to align the second lens with the first lens so as to couple an optical signal into or out of the optical waveguide within the IC chip.Type: GrantFiled: February 14, 2006Date of Patent: November 20, 2007Assignee: Applied Materials, Inc.Inventors: Edward L. Palen, Gregory L. Wojcik, Lawrence C. West
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Patent number: 7170142Abstract: A planar integrated circuit includes a semiconductor substrate having a substrate surface and a trench in the substrate, a waveguide medium in the trench having a top surface and a light propagation axis, the trench having a sufficient depth for the waveguide medium to be at or below said substrate surface, and at least one Schottky barrier electrode formed on the top surface of said waveguide medium and defining a Schottky barrier detector consisting of the electrode and the portion of the waveguide medium underlying the Schottky barrier electrode, at least the underlying portion of the waveguide medium being a semiconductor and defining an electrode-semiconductor interface parallel to the light propagation axis so that light of a predetermined wavelength from said waveguide medium propagates along the interface as a plasmon-polariton wave.Type: GrantFiled: May 26, 2004Date of Patent: January 30, 2007Assignee: Applied Materials, Inc.Inventors: Gregory L. Wojcik, Lawrence C. West, Thomas P. Pearsall
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Patent number: 7103079Abstract: A circuit for generating a clock or sampling signal, the circuit including: a semiconductor quantum dot laser element including a region of quantum dots, wherein the region of quantum dots is characterized by an emission distribution having a half-width of at least about 10 meV; and drive circuitry connected to the quantum dot laser element for operating the quantum dot laser element as a mode-locked laser that outputs a periodic, uniformly spaced sequence of pulses, wherein the clock or sampling signal is derived from the sequence of pulses.Type: GrantFiled: June 28, 2004Date of Patent: September 5, 2006Assignee: Applied Materials, Inc.Inventors: John G. McInerney, Gregory L. Wojcik, Lawrence C. West
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Patent number: 7075165Abstract: A method of fabricating a detector that involves: forming a trench in a substrate, the substrate having an upper surface; forming a first doped semiconductor layer on the substrate and in the trench; forming a second semiconductor layer on the first doped semiconductor layer and extending into the trench, the second semiconductor layer having a conductivity that is less than the conductivity of the first doped semiconductor layer; forming a third doped semiconductor layer on the second semiconductor layer and extending into the trench; removing portions of the first, second and third layers that are above a plane defined by the surface of the substrate to produce an upper, substantially planar surface and expose an upper end of the first doped semiconductor layer in the trench; forming a first electrical contact to the first semiconductor doped layer; and forming a second electrical contact to the third semiconductor doped layer.Type: GrantFiled: May 28, 2004Date of Patent: July 11, 2006Assignee: Applied Material, Inc.Inventors: Francisco A. Leon, Lawrence C. West, Yuichi Wada, Gregory L. Wojcik, Stephen Moffatt
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Patent number: 7001788Abstract: A method of fabricating a waveguide mirror that involves etching a trench in a silicon substrate; depositing a film (e.g. silicon dioxide) over the surface of the silicon substrate and into the trench; ion etching the film to remove at least some of the deposited silicon dioxide and to leave a facet of film in inside corners of the trench; depositing a layer of SiGe over the substrate to fill up the trench; and planarizing the deposited SiGe to remove the SiGe from above the level of the trench.Type: GrantFiled: May 28, 2004Date of Patent: February 21, 2006Assignee: Applied Materials, Inc.Inventors: Francisco A. Leon, Lawrence C. West, Gregory L. Wojcik, Yuichi Wada