Patents by Inventor Gregory M. Jursich
Gregory M. Jursich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7906094Abstract: Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.Type: GrantFiled: September 28, 2007Date of Patent: March 15, 2011Assignees: L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude, American Air Liquide, Inc., Air Liquide Electronics U.S. LPInventors: Cyril Bourasseau, Gregory M. Jursich, Mindi Xu, John P. Borzio, Donald W. Mitchell, Jr., Derong Zhou, Thomas K. Moncur
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Publication number: 20080175784Abstract: Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.Type: ApplicationFiled: September 28, 2007Publication date: July 24, 2008Applicants: American Air Liquide, Inc., Air Liquide Electronics U.S. LP, L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges ClaudeInventors: Cyril Bourasseau, Gregory M. Jursich, Mindi Xu, John P. Borzio, Donald W. Mitchell, Derong Zhou, Thomas K. Moncur
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Patent number: 7334708Abstract: Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks.Type: GrantFiled: June 21, 2002Date of Patent: February 26, 2008Assignees: L'Air Liquide, Societe Anonyme A Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude, Air Liquide America Corporation, American Air Liquide, Inc.Inventors: Mindi Xu, Tay Sayasane, Joseph E. Paganessi, Gregory M. Jursich, Naoyuki Nakamoto, Yukinobu Nishikawa, Herve E. Dulphy, Guillaume Rameau, Lorrin Honda
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Patent number: 7312165Abstract: Methods of film deposition using metals and metal oxides. A thin film of germanium oxide and an oxide of a non-germanium metal is deposited by ALD by alternating deposition of first and second precursor compounds, wherein the first precursor compound includes a metal other than germanium, and the second precursor compound includes germanium.Type: GrantFiled: May 5, 2005Date of Patent: December 25, 2007Inventors: Gregory M. Jursich, Ronald S. Inman
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Patent number: 7175696Abstract: Herein is disclosed a method and an apparatus for preparing a highly purified gas from a crude liquid comprising the gas and one or more of a metal, particulates, water vapor, or a volatile impurity. The method comprises: (a) vaporizing the crude liquid, to yield (i) a first vapor stream comprising the gas and (ii) a first liquid stream comprising the gas; (b) removing water vapor, particulates, or both from the first vapor stream, to yield a second vapor stream comprising the gas; (c) condensing the second vapor stream, to yield a second liquid stream comprising the gas; and (d) sparging the second liquid stream with an inert gas, to yield (i) a third vapor stream comprising the gas and (ii) a third liquid stream comprising the highly purified gas. Also disclosed is a method for preparing an adsorbent to effectively remove water vapor from the gas, as well as an adsorbent so prepared.Type: GrantFiled: February 18, 2003Date of Patent: February 13, 2007Assignees: American Air Liquide, Inc., Air Liquide America L.P.Inventors: Derong Zhou, John P. Borzio, Gregory M. Jursich, Earle R. Kebbekus
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Patent number: 7141500Abstract: A method of forming an aluminum containing film on a substrate includes providing a precursor having the chemical structure: Al(NR1R2)(NR3R4)(NR5R6); where each of R1, R2, R3, R4, R5 and R6 is independently selected from the group consisting of hydrogen and an alkyl group including at least two carbon atoms. The precursor is utilized to form a film on the substrate including at least one of aluminum oxide, aluminum nitride and aluminum oxy-nitride. Each of the R1–R6 groups can be the same or different and can by straight or branched chain alkyls. An exemplary precursor that has is useful in forming aluminum containing films is tris diethylamino aluminum.Type: GrantFiled: May 13, 2004Date of Patent: November 28, 2006Assignee: American Air Liquide, Inc.Inventors: Gregory M. Jursich, Ronald S. Inman
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Publication number: 20040038803Abstract: Herein is disclosed a method for preparing an adsorbent to effectively remove water vapor during purification of a corrosive gas, as well as an adsorbent so prepared.Type: ApplicationFiled: February 18, 2003Publication date: February 26, 2004Inventors: Derong Zhou, John P. Borzio, Gregory M. Jursich, Earle R. Kebbekus
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Publication number: 20030221947Abstract: Herein is disclosed a method and an apparatus for preparing a highly purified gas from a crude liquid comprising the gas and one or more of a metal, particulates, water vapor, or a volatile impurity. The method comprises: (a) vaporizing the crude liquid, to yield (i) a first vapor stream comprising the gas and (ii) a first liquid stream comprising the gas; (b) removing water vapor, particulates, or both from the first vapor stream, to yield a second vapor stream comprising the gas; (c) condensing the second vapor stream, to yield a second liquid stream comprising the gas; and (d) sparging the second liquid stream with an inert gas, to yield (i) a third vapor stream comprising the gas and (ii) a third liquid stream comprising the highly purified gas. Also disclosed is a method for preparing an adsorbent to effectively remove water vapor from the gas, as well as an adsorbent so prepared.Type: ApplicationFiled: February 18, 2003Publication date: December 4, 2003Inventors: Derong Zhou, John P. Borzio, Gregory M. Jursich, Earle R. Kebbekus
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Patent number: 6581649Abstract: Methods and apparatus for delivery of high purity reactive liquids using gaseous assist are described, the apparatus comprising a container body, the container body having fluidly connected thereto a gas inlet and a reactive liquid outlet, the gas inlet fitted with a means adapted to hold a gas filter media, and a gas filter media positioned within said means adapted to hold a gas filter media, the gas inlet having a gas inlet valve, the liquid outlet having a liquid outlet valve.Type: GrantFiled: July 13, 2001Date of Patent: June 24, 2003Assignees: L'Air Liquide - Societe Anonyme a'Directiore et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude, American Air LiquideInventor: Gregory M. Jursich
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Patent number: 6543493Abstract: An apparatus of measuring both concentration and amount of a liquid in a liquid chemical container is presented, comprising viewing light emanating from a first optical member that is in visual contact with the liquid, the light emanating from the optical member having a level indicating quality; and routing light from a second optical member that is in visual contact with the liquid to means for optical discrimination between liquid chemical based on different optical properties.Type: GrantFiled: July 13, 2001Date of Patent: April 8, 2003Assignees: L'Air Liquide - Societe'Anonyme a' Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude, American Air Liquide, Inc.Inventors: Gregory M. Jursich, Kevin Sirk
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Publication number: 20030015249Abstract: Methods and apparatus for delivery of high purity reactive liquids using gaseous assist are described, the apparatus comprising a container body, the container body having fluidly connected thereto a gas inlet and a reactive liquid outlet, the gas inlet fitted with a means adapted to hold a gas filter media, and a gas filter media positioned within said means adapted to hold a gas filter media, the gas inlet having a gas inlet valve, the liquid outlet having a liquid outlet valveType: ApplicationFiled: July 13, 2001Publication date: January 23, 2003Inventor: Gregory M. Jursich
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Publication number: 20030010396Abstract: Methods and apparatus of measuring both concentration and amount of a liquid in a liquid chemical container are presented, one method comprising the steps of: (a) viewing light emanating from a first optical member that is in visual contact with the liquid, the light emanating from the optical member having a level indicating quality; and (b) routing light from a second optical member that is in visual contact with the liquid to means for optical discrimination between liquid chemical based on different optical properties.Type: ApplicationFiled: July 13, 2001Publication date: January 16, 2003Inventors: Gregory M. Jursich, Kevin Sirk
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Publication number: 20030012709Abstract: Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks.Type: ApplicationFiled: June 21, 2002Publication date: January 16, 2003Inventors: Mindi Xu, Tay Sayasane, Joseph E. Paganessi, Gregory M. Jursich, Naoyuki Nakamoto, Yukinobu Nishikawa, Herve E. Dulphy, Guillaume Rameau, Lorrin Honda
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Patent number: 6361750Abstract: Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the process comprises injecting an inert gas into a container having condensed BCl3 therein, the condensed BCl3 having therein a minor portion of phosgene impurity. A major portion of the phosgene in the condensed BCl3 is decomposed to carbon monoxide and chlorine by increasing temperature to produce a phosgene deficient stream. The temperature of the phosgene deficient stream is then decreased, and contacted with an adsorbent to remove the chlorine in the stream by adsorption to form a chlorine and phosgene free condensed stream. The chlorine and phosgene free stream is stripped using an inert gas to form a BCl3 product condensed stream, and an inert gas is used to pump the BCl3 product condensed stream to a product receiver.Type: GrantFiled: November 29, 2000Date of Patent: March 26, 2002Assignees: Air Liquide America Corporation, American Air Liquide, Inc.Inventors: Derong Zhou, Gregory M. Jursich, Earle R. Kebbekus, John P. Borzio, Jason R. Uner
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Patent number: 6238636Abstract: Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the process comprises injecting an inert gas into a container having condensed BCl3 therein, the condensed BCl3 having therein a minor portion of phosgene impurity. A major portion of the phosgene in the condensed BCl3 is decomposed to carbon monoxide and chlorine by increasing temperature to produce a phosgene deficient stream. The temperature of the phosgene deficient stream is then decreased, and contacted with an adsorbent to remove the chlorine in the stream by adsorption to form a chlorine and phosgene free condensed stream. The chlorine and phosgene free stream is stripped using an inert gas to form a BCl3 product condensed stream, and an inert gas is used to pump the BCl3 product condensed stream to a product receiver.Type: GrantFiled: September 3, 1999Date of Patent: May 29, 2001Assignees: Air Liquide America Corporation, American Air Liquide, Inc.Inventors: Derong Zhou, Gregory M. Jursich, Earle R. Kebbekus, John P. Borzio, Jason R. Uner
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Publication number: 20010000141Abstract: Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the process comprises injecting an inert gas into a container having condensed BCl3 therein, the condensed BCl3 having therein a minor portion of phosgene impurity. A major portion of the phosgene in the condensed BCl3 is decomposed to carbon monoxide and chlorine by increasing temperature to produce a phosgene deficient stream. The temperature of the phosgene deficient stream is then decreased, and contacted with an adsorbent to remove the chlorine in the stream by adsorption to form a chlorine and phosgene free condensed stream. The chlorine and phosgene free stream is stripped using an inert gas to form a BCl3 product condensed stream, and an inert gas is used to pump the BCl3 product condensed stream to a product receiver.Type: ApplicationFiled: November 29, 2000Publication date: April 5, 2001Inventors: Derong Zhou, Gregory M. Jursich, Earle R. Kebbekus, John P. Borzio, Jason R. Uner
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Patent number: 5897847Abstract: A method for extending the gas lifetime of an excimer laser by removing CF.sub.4 impurity, which comprises:a) reacting CF.sub.4, an undesirable impurity which forms and is contained in the lasing gases, with an amount of an oxidizing gas additive effective to produce one or more compounds which are condensible with refrigeration means, without reducing laser output below a predetermined acceptable level; andb) condensing said one or more compounds produced in step a) with refrigeration means, substantially without condensing said one or more rare gases therewith, thereby removing said CF.sub.4 impurity from said excimer laser and extending the gas lifetime of the laser.Type: GrantFiled: September 1, 1993Date of Patent: April 27, 1999Assignee: American Air LiquideInventors: Gregory M. Jursich, William A. Von Drasek
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Patent number: 5672827Abstract: Provided is a method for determining gas flow rates in an exhaust gas stream from a combustion process by measuring the amounts of a tracer gas inherently present in a gas used in the combustion process at a point upstream from the exhaust gas and at a point in the exhaust gas stream itself. The flow rate is determined by comparing the concentration of the tracer gas at the two points using a mass balance. Flow/emission of a particular species in the exhaust gas is determined by using the present method upon measuring the concentration of the species in the exhaust gas. The most preferred tracer gases include helium and argon.Type: GrantFiled: June 7, 1995Date of Patent: September 30, 1997Assignee: American Air Liquide Inc.Inventor: Gregory M. Jursich
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Patent number: 5063035Abstract: Low-level fluorine concentrations are removed from gases by conducting a gas stream containing fluorine over an alumina treated with chromium oxide material, thereby effectively eliminating fluorine from the gas while preventing the formation of toxic oxygen difluoride by-product.Type: GrantFiled: April 23, 1990Date of Patent: November 5, 1991Assignee: American Air LiquideInventors: Paul S. Leondaridis, William A. Von Drasek, Gregory M. Jursich