Patents by Inventor Gregory P. Devine

Gregory P. Devine has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for vacuum vapor deposition with improved mass flow control
    Patent number: 4717596
    Abstract: A method for forming a uniform layer of a material from a vapor phase onto the surface of an object at a high rate of deposition includes a heated reservoir for vaporizing the material to be deposited, a reactor containing the objects to be coated, and a vacuum device for flowing the gaseous material from the reservoir to the reactor. The mass flow rate of the gas from the reservoir is held constant by precisely controlling the pressure at the outlet of the reservoir and at the inlet of the reactor. In one embodiment the upstream pressure is controlled by a valve responsive to a pressure sensor at the reservoir outlet, and the downstream pressure is controlled by adjusting the vacuum in the reactor as measured by a pressure sensor at the reactor inlet.
    Type: Grant
    Filed: October 3, 1986
    Date of Patent: January 5, 1988
    Assignee: International Business Machines Corporation
    Inventors: Steven G. Barbee, Gregory P. Devine, William J. Patrick, Gerard Seeley
  • Vacuum deposition system with improved mass flow control
    Patent number: 4640221
    Abstract: A system and method for forming a uniform layer of a material from a vapor phase onto the surface of an object at a high rate of deposition includes a heated reservoir for vaporizing the material to be deposited, a reactor containing the objects to be coated, and a vacuum device for flowing the gaseous material from the reservoir to the reactor. The mass flow rate of the gas from the reservoir is held constant by precisely controlling the pressure at the outlet of the reservoir and at the inlet of the reactor. In one embodiment the upstream pressure is controlled by a valve responsive to a pressure sensor at the reservoir outlet, and the downstream pressure is controlled by adjusting the vacuum in the reactor as measured by a pressure sensor at the reactor inlet.
    Type: Grant
    Filed: October 30, 1985
    Date of Patent: February 3, 1987
    Assignee: International Business Machines Corporation
    Inventors: Steven G. Barbee, Gregory P. Devine, William J. Patrick, Gerard Seeley